4/26/2011	9:23:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/26/2011	9:23:19 AM	Recipe started at 9:23 AM
4/26/2011	9:23:19 AM	H2 valve closed
4/26/2011	9:23:19 AM	BCl3 valve closed
4/26/2011	9:23:19 AM	PH3 valve closed
4/26/2011	9:23:19 AM	SiCl4 pre valve closed
4/26/2011	9:23:19 AM	SiCl4 post valve closed
4/26/2011	9:23:19 AM	Main Vac valve closed
4/26/2011	9:23:19 AM	Bypass valve closed
4/26/2011	9:23:19 AM	Bubbler valve closed
4/26/2011	9:23:19 AM	Helium valve opened
4/26/2011	9:23:19 AM	Helium MFC set to  500.000000
4/26/2011	9:23:19 AM	H2 MFC set to  0.000000
4/26/2011	9:23:19 AM	BCl3 MFC set to  0.000000
4/26/2011	9:23:19 AM	PHl3 MFC set to  0.000000
4/26/2011	9:23:19 AM	SiCl4 MFC set to  0.000000
4/26/2011	9:23:19 AM	Bypass solenoid MFC set to  0.000000
4/26/2011	9:23:19 AM	Tube furnace set to 0
4/26/2011	9:24:40 AM	Helium valve closed
4/26/2011	9:24:40 AM	H2 valve closed
4/26/2011	9:24:40 AM	BCl3 valve closed
4/26/2011	9:24:40 AM	PH3 valve closed
4/26/2011	9:24:40 AM	SiCl4 pre valve closed
4/26/2011	9:24:40 AM	SiCl4 post valve closed
4/26/2011	9:24:40 AM	Main Vac valve closed
4/26/2011	9:24:40 AM	Bypass valve closed
4/26/2011	9:24:40 AM	Bubbler valve closed
4/26/2011	9:24:40 AM	Helium MFC set to  0.000000
4/26/2011	9:24:40 AM	H2 MFC set to  0.000000
4/26/2011	9:24:40 AM	BCl3 MFC set to  0.000000
4/26/2011	9:24:40 AM	PHl3 MFC set to  0.000000
4/26/2011	9:24:40 AM	SiCl4 MFC set to  0.000000
4/26/2011	9:24:40 AM	Bypass solenoid MFC set to  0.000000
4/26/2011	9:24:40 AM	Tube furnace set to 0
4/26/2011	9:24:40 AM	Run finished at 9:24 AM
4/26/2011	9:24:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/26/2011	9:26:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/26/2011	9:26:09 AM	Recipe started at 9:26 AM
4/26/2011	9:26:09 AM	Helium valve closed
4/26/2011	9:26:09 AM	H2 valve closed
4/26/2011	9:26:09 AM	BCl3 valve closed
4/26/2011	9:26:09 AM	PH3 valve closed
4/26/2011	9:26:09 AM	SiCl4 pre valve closed
4/26/2011	9:26:09 AM	SiCl4 post valve closed
4/26/2011	9:26:09 AM	Main Vac valve closed
4/26/2011	9:26:09 AM	Bubbler valve closed
4/26/2011	9:26:09 AM	Bypass valve opened
4/26/2011	9:26:09 AM	Helium MFC set to  0.000000
4/26/2011	9:26:09 AM	H2 MFC set to  0.000000
4/26/2011	9:26:09 AM	BCl3 MFC set to  0.000000
4/26/2011	9:26:09 AM	PHl3 MFC set to  0.000000
4/26/2011	9:26:09 AM	SiCl4 MFC set to  0.000000
4/26/2011	9:26:09 AM	Bypass solenoid MFC set to  0.000000
4/26/2011	9:26:09 AM	Tube furnace set to 0
4/26/2011	9:26:40 AM	Helium valve closed
4/26/2011	9:26:40 AM	H2 valve closed
4/26/2011	9:26:40 AM	BCl3 valve closed
4/26/2011	9:26:40 AM	PH3 valve closed
4/26/2011	9:26:40 AM	SiCl4 pre valve closed
4/26/2011	9:26:40 AM	SiCl4 post valve closed
4/26/2011	9:26:40 AM	Bubbler valve closed
4/26/2011	9:26:40 AM	Main Vac valve opened
4/26/2011	9:26:40 AM	Bypass valve opened
4/26/2011	9:26:40 AM	Helium MFC set to  0.000000
4/26/2011	9:26:40 AM	H2 MFC set to  0.000000
4/26/2011	9:26:40 AM	BCl3 MFC set to  0.000000
4/26/2011	9:26:40 AM	PHl3 MFC set to  0.000000
4/26/2011	9:26:40 AM	SiCl4 MFC set to  0.000000
4/26/2011	9:26:40 AM	Bypass solenoid MFC set to  0.000000
4/26/2011	9:26:41 AM	Tube furnace set to 0
4/26/2011	9:26:41 AM	Run finished at 9:26 AM
4/26/2011	9:26:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/26/2011	11:32:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/26/2011	11:32:37 AM	Recipe started at 11:32 AM
4/26/2011	11:32:37 AM	Helium valve closed
4/26/2011	11:32:37 AM	H2 valve closed
4/26/2011	11:32:37 AM	BCl3 valve closed
4/26/2011	11:32:37 AM	PH3 valve closed
4/26/2011	11:32:37 AM	SiCl4 pre valve closed
4/26/2011	11:32:37 AM	SiCl4 post valve closed
4/26/2011	11:32:37 AM	Main Vac valve closed
4/26/2011	11:32:37 AM	Bypass valve closed
4/26/2011	11:32:37 AM	Bubbler valve closed
4/26/2011	11:32:37 AM	Helium MFC set to  0.000000
4/26/2011	11:32:37 AM	H2 MFC set to  0.000000
4/26/2011	11:32:37 AM	BCl3 MFC set to  0.000000
4/26/2011	11:32:37 AM	PHl3 MFC set to  0.000000
4/26/2011	11:32:37 AM	SiCl4 MFC set to  0.000000
4/26/2011	11:32:37 AM	Bypass solenoid MFC set to  0.000000
4/26/2011	11:32:38 AM	Tube furnace set to 0
4/26/2011	11:32:38 AM	Run finished at 11:32 AM
4/26/2011	11:32:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/26/2011	11:32:53 AM	Recipe started at 11:32 AM
4/26/2011	11:32:53 AM	Helium valve closed
4/26/2011	11:32:53 AM	BCl3 valve closed
4/26/2011	11:32:53 AM	PH3 valve closed
4/26/2011	11:32:53 AM	SiCl4 pre valve closed
4/26/2011	11:32:53 AM	SiCl4 post valve closed
4/26/2011	11:32:53 AM	Main Vac valve closed
4/26/2011	11:32:53 AM	Bypass valve closed
4/26/2011	11:32:53 AM	Bubbler valve closed
4/26/2011	11:32:53 AM	H2 valve opened
4/26/2011	11:32:53 AM	Helium MFC set to  0.000000
4/26/2011	11:32:53 AM	H2 MFC set to  500.000000
4/26/2011	11:32:53 AM	BCl3 MFC set to  0.000000
4/26/2011	11:32:53 AM	PHl3 MFC set to  0.000000
4/26/2011	11:32:53 AM	SiCl4 MFC set to  0.000000
4/26/2011	11:32:53 AM	Bypass solenoid MFC set to  0.000000
4/26/2011	11:32:54 AM	Tube furnace set to 0
4/26/2011	11:34:15 AM	Helium valve closed
4/26/2011	11:34:15 AM	BCl3 valve closed
4/26/2011	11:34:15 AM	PH3 valve closed
4/26/2011	11:34:15 AM	SiCl4 pre valve closed
4/26/2011	11:34:15 AM	SiCl4 post valve closed
4/26/2011	11:34:15 AM	Main Vac valve closed
4/26/2011	11:34:15 AM	Bypass valve closed
4/26/2011	11:34:15 AM	H2 valve opened
4/26/2011	11:34:15 AM	Bubbler valve opened
4/26/2011	11:34:15 AM	Helium MFC set to  0.000000
4/26/2011	11:34:15 AM	H2 MFC set to  500.000000
4/26/2011	11:34:15 AM	BCl3 MFC set to  0.000000
4/26/2011	11:34:15 AM	PHl3 MFC set to  0.000000
4/26/2011	11:34:15 AM	SiCl4 MFC set to  0.000000
4/26/2011	11:34:15 AM	Bypass solenoid MFC set to  0.000000
4/26/2011	11:34:15 AM	Tube furnace set to 1000
4/26/2011	11:54:15 AM	Helium valve closed
4/26/2011	11:54:15 AM	PH3 valve closed
4/26/2011	11:54:15 AM	Main Vac valve closed
4/26/2011	11:54:15 AM	Bypass valve closed
4/26/2011	11:54:15 AM	H2 valve opened
4/26/2011	11:54:15 AM	BCl3 valve opened
4/26/2011	11:54:15 AM	SiCl4 pre valve opened
4/26/2011	11:54:15 AM	SiCl4 post valve opened
4/26/2011	11:54:15 AM	Bubbler valve opened
4/26/2011	11:54:15 AM	Helium MFC set to  0.000000
4/26/2011	11:54:15 AM	H2 MFC set to  500.000000
4/26/2011	11:54:15 AM	BCl3 MFC set to  3.000000
4/26/2011	11:54:15 AM	PHl3 MFC set to  0.000000
4/26/2011	11:54:15 AM	SiCl4 MFC set to  50.000000
4/26/2011	11:54:15 AM	Bypass solenoid MFC set to  0.000000
4/26/2011	11:54:15 AM	Tube furnace set to 1000
4/26/2011	12:14:15 PM	H2 valve closed
4/26/2011	12:14:15 PM	BCl3 valve closed
4/26/2011	12:14:15 PM	PH3 valve closed
4/26/2011	12:14:15 PM	SiCl4 pre valve closed
4/26/2011	12:14:15 PM	SiCl4 post valve closed
4/26/2011	12:14:15 PM	Main Vac valve closed
4/26/2011	12:14:15 PM	Bypass valve closed
4/26/2011	12:14:15 PM	Helium valve opened
4/26/2011	12:14:15 PM	Bubbler valve opened
4/26/2011	12:14:15 PM	Helium MFC set to  500.000000
4/26/2011	12:14:15 PM	H2 MFC set to  0.000000
4/26/2011	12:14:15 PM	BCl3 MFC set to  0.000000
4/26/2011	12:14:15 PM	PHl3 MFC set to  0.000000
4/26/2011	12:14:15 PM	SiCl4 MFC set to  0.000000
4/26/2011	12:14:15 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	12:14:15 PM	Tube furnace set to 0
4/26/2011	12:34:15 PM	Helium valve closed
4/26/2011	12:34:15 PM	H2 valve closed
4/26/2011	12:34:15 PM	BCl3 valve closed
4/26/2011	12:34:15 PM	PH3 valve closed
4/26/2011	12:34:15 PM	SiCl4 pre valve closed
4/26/2011	12:34:15 PM	SiCl4 post valve closed
4/26/2011	12:34:15 PM	Main Vac valve closed
4/26/2011	12:34:15 PM	Bypass valve closed
4/26/2011	12:34:15 PM	Bubbler valve closed
4/26/2011	12:34:15 PM	Helium MFC set to  0.000000
4/26/2011	12:34:15 PM	H2 MFC set to  0.000000
4/26/2011	12:34:15 PM	BCl3 MFC set to  0.000000
4/26/2011	12:34:15 PM	PHl3 MFC set to  0.000000
4/26/2011	12:34:15 PM	SiCl4 MFC set to  0.000000
4/26/2011	12:34:15 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	12:34:15 PM	Tube furnace set to 0
4/26/2011	12:34:15 PM	Run finished at 12:34 PM
4/26/2011	2:31:25 PM	Main Vac valve opened
4/26/2011	2:34:36 PM	Main Vac valve closed
4/26/2011	2:36:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/26/2011	2:36:09 PM	Recipe started at 2:36 PM
4/26/2011	2:36:09 PM	Helium valve closed
4/26/2011	2:36:09 PM	H2 valve closed
4/26/2011	2:36:09 PM	BCl3 valve closed
4/26/2011	2:36:09 PM	PH3 valve closed
4/26/2011	2:36:09 PM	SiCl4 pre valve closed
4/26/2011	2:36:09 PM	SiCl4 post valve closed
4/26/2011	2:36:09 PM	Main Vac valve closed
4/26/2011	2:36:09 PM	Bubbler valve closed
4/26/2011	2:36:09 PM	Bypass valve opened
4/26/2011	2:36:09 PM	Helium MFC set to  0.000000
4/26/2011	2:36:09 PM	H2 MFC set to  0.000000
4/26/2011	2:36:09 PM	BCl3 MFC set to  0.000000
4/26/2011	2:36:09 PM	PHl3 MFC set to  0.000000
4/26/2011	2:36:09 PM	SiCl4 MFC set to  0.000000
4/26/2011	2:36:09 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	2:36:09 PM	Tube furnace set to 0
4/26/2011	2:36:48 PM	Helium valve closed
4/26/2011	2:36:48 PM	H2 valve closed
4/26/2011	2:36:48 PM	BCl3 valve closed
4/26/2011	2:36:48 PM	PH3 valve closed
4/26/2011	2:36:48 PM	SiCl4 pre valve closed
4/26/2011	2:36:48 PM	SiCl4 post valve closed
4/26/2011	2:36:48 PM	Bubbler valve closed
4/26/2011	2:36:48 PM	Main Vac valve opened
4/26/2011	2:36:48 PM	Bypass valve opened
4/26/2011	2:36:48 PM	Helium MFC set to  0.000000
4/26/2011	2:36:48 PM	H2 MFC set to  0.000000
4/26/2011	2:36:48 PM	BCl3 MFC set to  0.000000
4/26/2011	2:36:48 PM	PHl3 MFC set to  0.000000
4/26/2011	2:36:48 PM	SiCl4 MFC set to  0.000000
4/26/2011	2:36:48 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	2:36:49 PM	Tube furnace set to 0
4/26/2011	2:36:49 PM	Run finished at 2:36 PM
4/26/2011	2:36:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/26/2011	2:37:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/26/2011	2:37:13 PM	Recipe started at 2:37 PM
4/26/2011	2:37:14 PM	Helium valve closed
4/26/2011	2:37:14 PM	H2 valve closed
4/26/2011	2:37:14 PM	BCl3 valve closed
4/26/2011	2:37:14 PM	PH3 valve closed
4/26/2011	2:37:14 PM	SiCl4 pre valve closed
4/26/2011	2:37:14 PM	SiCl4 post valve closed
4/26/2011	2:37:14 PM	Main Vac valve closed
4/26/2011	2:37:14 PM	Bubbler valve closed
4/26/2011	2:37:14 PM	Bypass valve opened
4/26/2011	2:37:14 PM	Helium MFC set to  0.000000
4/26/2011	2:37:14 PM	H2 MFC set to  0.000000
4/26/2011	2:37:14 PM	BCl3 MFC set to  0.000000
4/26/2011	2:37:14 PM	PHl3 MFC set to  0.000000
4/26/2011	2:37:14 PM	SiCl4 MFC set to  0.000000
4/26/2011	2:37:14 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	2:37:14 PM	Tube furnace set to 0
4/26/2011	2:37:14 PM	Helium valve closed
4/26/2011	2:37:14 PM	H2 valve closed
4/26/2011	2:37:14 PM	BCl3 valve closed
4/26/2011	2:37:14 PM	PH3 valve closed
4/26/2011	2:37:14 PM	SiCl4 pre valve closed
4/26/2011	2:37:14 PM	SiCl4 post valve closed
4/26/2011	2:37:14 PM	Bubbler valve closed
4/26/2011	2:37:14 PM	Main Vac valve opened
4/26/2011	2:37:14 PM	Bypass valve opened
4/26/2011	2:37:14 PM	Helium MFC set to  0.000000
4/26/2011	2:37:14 PM	H2 MFC set to  0.000000
4/26/2011	2:37:14 PM	BCl3 MFC set to  0.000000
4/26/2011	2:37:14 PM	PHl3 MFC set to  0.000000
4/26/2011	2:37:14 PM	SiCl4 MFC set to  0.000000
4/26/2011	2:37:14 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	2:37:14 PM	Tube furnace set to 0
4/26/2011	2:38:14 PM	H2 valve closed
4/26/2011	2:38:14 PM	BCl3 valve closed
4/26/2011	2:38:14 PM	PH3 valve closed
4/26/2011	2:38:14 PM	SiCl4 pre valve closed
4/26/2011	2:38:14 PM	SiCl4 post valve closed
4/26/2011	2:38:14 PM	Bubbler valve closed
4/26/2011	2:38:14 PM	Helium valve opened
4/26/2011	2:38:14 PM	Main Vac valve opened
4/26/2011	2:38:14 PM	Bypass valve opened
4/26/2011	2:38:14 PM	Helium MFC set to  100.000000
4/26/2011	2:38:14 PM	H2 MFC set to  0.000000
4/26/2011	2:38:14 PM	BCl3 MFC set to  0.000000
4/26/2011	2:38:14 PM	PHl3 MFC set to  0.000000
4/26/2011	2:38:14 PM	SiCl4 MFC set to  0.000000
4/26/2011	2:38:14 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	2:38:14 PM	Tube furnace set to 0
4/26/2011	2:39:14 PM	Helium valve closed
4/26/2011	2:39:14 PM	H2 valve closed
4/26/2011	2:39:14 PM	BCl3 valve closed
4/26/2011	2:39:14 PM	PH3 valve closed
4/26/2011	2:39:14 PM	SiCl4 pre valve closed
4/26/2011	2:39:14 PM	SiCl4 post valve closed
4/26/2011	2:39:14 PM	Bubbler valve closed
4/26/2011	2:39:14 PM	Main Vac valve opened
4/26/2011	2:39:14 PM	Bypass valve opened
4/26/2011	2:39:14 PM	Helium MFC set to  0.000000
4/26/2011	2:39:14 PM	H2 MFC set to  0.000000
4/26/2011	2:39:14 PM	BCl3 MFC set to  0.000000
4/26/2011	2:39:14 PM	PHl3 MFC set to  0.000000
4/26/2011	2:39:14 PM	SiCl4 MFC set to  0.000000
4/26/2011	2:39:14 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	2:39:15 PM	Tube furnace set to 0
4/26/2011	2:40:15 PM	H2 valve closed
4/26/2011	2:40:15 PM	BCl3 valve closed
4/26/2011	2:40:15 PM	PH3 valve closed
4/26/2011	2:40:15 PM	SiCl4 pre valve closed
4/26/2011	2:40:15 PM	SiCl4 post valve closed
4/26/2011	2:40:15 PM	Bubbler valve closed
4/26/2011	2:40:15 PM	Helium valve opened
4/26/2011	2:40:15 PM	Main Vac valve opened
4/26/2011	2:40:15 PM	Bypass valve opened
4/26/2011	2:40:15 PM	Helium MFC set to  100.000000
4/26/2011	2:40:15 PM	H2 MFC set to  0.000000
4/26/2011	2:40:15 PM	BCl3 MFC set to  0.000000
4/26/2011	2:40:15 PM	PHl3 MFC set to  0.000000
4/26/2011	2:40:15 PM	SiCl4 MFC set to  0.000000
4/26/2011	2:40:15 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	2:40:15 PM	Tube furnace set to 0
4/26/2011	2:41:15 PM	Helium valve closed
4/26/2011	2:41:15 PM	H2 valve closed
4/26/2011	2:41:15 PM	BCl3 valve closed
4/26/2011	2:41:15 PM	PH3 valve closed
4/26/2011	2:41:15 PM	SiCl4 pre valve closed
4/26/2011	2:41:15 PM	SiCl4 post valve closed
4/26/2011	2:41:15 PM	Bubbler valve closed
4/26/2011	2:41:15 PM	Main Vac valve opened
4/26/2011	2:41:15 PM	Bypass valve opened
4/26/2011	2:41:15 PM	Helium MFC set to  0.000000
4/26/2011	2:41:15 PM	H2 MFC set to  0.000000
4/26/2011	2:41:15 PM	BCl3 MFC set to  0.000000
4/26/2011	2:41:15 PM	PHl3 MFC set to  0.000000
4/26/2011	2:41:15 PM	SiCl4 MFC set to  0.000000
4/26/2011	2:41:15 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	2:41:15 PM	Tube furnace set to 0
4/26/2011	2:42:15 PM	H2 valve closed
4/26/2011	2:42:15 PM	BCl3 valve closed
4/26/2011	2:42:15 PM	PH3 valve closed
4/26/2011	2:42:15 PM	SiCl4 pre valve closed
4/26/2011	2:42:15 PM	SiCl4 post valve closed
4/26/2011	2:42:15 PM	Bubbler valve closed
4/26/2011	2:42:15 PM	Helium valve opened
4/26/2011	2:42:15 PM	Main Vac valve opened
4/26/2011	2:42:15 PM	Bypass valve opened
4/26/2011	2:42:15 PM	Helium MFC set to  100.000000
4/26/2011	2:42:15 PM	H2 MFC set to  0.000000
4/26/2011	2:42:15 PM	BCl3 MFC set to  0.000000
4/26/2011	2:42:15 PM	PHl3 MFC set to  0.000000
4/26/2011	2:42:15 PM	SiCl4 MFC set to  0.000000
4/26/2011	2:42:15 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	2:42:15 PM	Tube furnace set to 0
4/26/2011	2:43:15 PM	Helium valve closed
4/26/2011	2:43:15 PM	H2 valve closed
4/26/2011	2:43:15 PM	BCl3 valve closed
4/26/2011	2:43:15 PM	PH3 valve closed
4/26/2011	2:43:15 PM	SiCl4 pre valve closed
4/26/2011	2:43:15 PM	SiCl4 post valve closed
4/26/2011	2:43:15 PM	Bubbler valve closed
4/26/2011	2:43:15 PM	Main Vac valve opened
4/26/2011	2:43:15 PM	Bypass valve opened
4/26/2011	2:43:15 PM	Helium MFC set to  0.000000
4/26/2011	2:43:15 PM	H2 MFC set to  0.000000
4/26/2011	2:43:15 PM	BCl3 MFC set to  0.000000
4/26/2011	2:43:15 PM	PHl3 MFC set to  0.000000
4/26/2011	2:43:15 PM	SiCl4 MFC set to  0.000000
4/26/2011	2:43:15 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	2:43:15 PM	Tube furnace set to 0
4/26/2011	2:44:15 PM	H2 valve closed
4/26/2011	2:44:15 PM	BCl3 valve closed
4/26/2011	2:44:15 PM	PH3 valve closed
4/26/2011	2:44:15 PM	SiCl4 pre valve closed
4/26/2011	2:44:15 PM	SiCl4 post valve closed
4/26/2011	2:44:15 PM	Bubbler valve closed
4/26/2011	2:44:15 PM	Helium valve opened
4/26/2011	2:44:15 PM	Main Vac valve opened
4/26/2011	2:44:15 PM	Bypass valve opened
4/26/2011	2:44:15 PM	Helium MFC set to  100.000000
4/26/2011	2:44:15 PM	H2 MFC set to  0.000000
4/26/2011	2:44:15 PM	BCl3 MFC set to  0.000000
4/26/2011	2:44:15 PM	PHl3 MFC set to  0.000000
4/26/2011	2:44:15 PM	SiCl4 MFC set to  0.000000
4/26/2011	2:44:15 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	2:44:16 PM	Tube furnace set to 0
4/26/2011	2:45:16 PM	Helium valve closed
4/26/2011	2:45:16 PM	H2 valve closed
4/26/2011	2:45:16 PM	BCl3 valve closed
4/26/2011	2:45:16 PM	PH3 valve closed
4/26/2011	2:45:16 PM	SiCl4 pre valve closed
4/26/2011	2:45:16 PM	SiCl4 post valve closed
4/26/2011	2:45:16 PM	Bubbler valve closed
4/26/2011	2:45:16 PM	Main Vac valve opened
4/26/2011	2:45:16 PM	Bypass valve opened
4/26/2011	2:45:16 PM	Helium MFC set to  0.000000
4/26/2011	2:45:16 PM	H2 MFC set to  0.000000
4/26/2011	2:45:16 PM	BCl3 MFC set to  0.000000
4/26/2011	2:45:16 PM	PHl3 MFC set to  0.000000
4/26/2011	2:45:16 PM	SiCl4 MFC set to  0.000000
4/26/2011	2:45:16 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	2:45:16 PM	Tube furnace set to 0
4/26/2011	2:46:16 PM	H2 valve closed
4/26/2011	2:46:16 PM	BCl3 valve closed
4/26/2011	2:46:16 PM	PH3 valve closed
4/26/2011	2:46:16 PM	SiCl4 pre valve closed
4/26/2011	2:46:16 PM	SiCl4 post valve closed
4/26/2011	2:46:16 PM	Bubbler valve closed
4/26/2011	2:46:16 PM	Helium valve opened
4/26/2011	2:46:16 PM	Main Vac valve opened
4/26/2011	2:46:16 PM	Bypass valve opened
4/26/2011	2:46:16 PM	Helium MFC set to  100.000000
4/26/2011	2:46:16 PM	H2 MFC set to  0.000000
4/26/2011	2:46:16 PM	BCl3 MFC set to  0.000000
4/26/2011	2:46:16 PM	PHl3 MFC set to  0.000000
4/26/2011	2:46:16 PM	SiCl4 MFC set to  0.000000
4/26/2011	2:46:16 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	2:46:16 PM	Tube furnace set to 0
4/26/2011	2:47:16 PM	Helium valve closed
4/26/2011	2:47:16 PM	H2 valve closed
4/26/2011	2:47:16 PM	BCl3 valve closed
4/26/2011	2:47:16 PM	PH3 valve closed
4/26/2011	2:47:16 PM	SiCl4 pre valve closed
4/26/2011	2:47:16 PM	SiCl4 post valve closed
4/26/2011	2:47:16 PM	Bubbler valve closed
4/26/2011	2:47:16 PM	Main Vac valve opened
4/26/2011	2:47:16 PM	Bypass valve opened
4/26/2011	2:47:16 PM	Helium MFC set to  0.000000
4/26/2011	2:47:16 PM	H2 MFC set to  0.000000
4/26/2011	2:47:16 PM	BCl3 MFC set to  0.000000
4/26/2011	2:47:16 PM	PHl3 MFC set to  0.000000
4/26/2011	2:47:16 PM	SiCl4 MFC set to  0.000000
4/26/2011	2:47:16 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	2:47:16 PM	Tube furnace set to 0
4/26/2011	2:48:16 PM	H2 valve closed
4/26/2011	2:48:16 PM	BCl3 valve closed
4/26/2011	2:48:16 PM	PH3 valve closed
4/26/2011	2:48:16 PM	SiCl4 pre valve closed
4/26/2011	2:48:16 PM	SiCl4 post valve closed
4/26/2011	2:48:16 PM	Bubbler valve closed
4/26/2011	2:48:16 PM	Helium valve opened
4/26/2011	2:48:16 PM	Main Vac valve opened
4/26/2011	2:48:16 PM	Bypass valve opened
4/26/2011	2:48:16 PM	Helium MFC set to  100.000000
4/26/2011	2:48:16 PM	H2 MFC set to  0.000000
4/26/2011	2:48:16 PM	BCl3 MFC set to  0.000000
4/26/2011	2:48:16 PM	PHl3 MFC set to  0.000000
4/26/2011	2:48:16 PM	SiCl4 MFC set to  0.000000
4/26/2011	2:48:16 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	2:48:16 PM	Tube furnace set to 0
4/26/2011	2:49:16 PM	Helium valve closed
4/26/2011	2:49:16 PM	H2 valve closed
4/26/2011	2:49:16 PM	BCl3 valve closed
4/26/2011	2:49:16 PM	PH3 valve closed
4/26/2011	2:49:16 PM	SiCl4 pre valve closed
4/26/2011	2:49:16 PM	SiCl4 post valve closed
4/26/2011	2:49:16 PM	Bubbler valve closed
4/26/2011	2:49:16 PM	Main Vac valve opened
4/26/2011	2:49:16 PM	Bypass valve opened
4/26/2011	2:49:16 PM	Helium MFC set to  0.000000
4/26/2011	2:49:16 PM	H2 MFC set to  0.000000
4/26/2011	2:49:16 PM	BCl3 MFC set to  0.000000
4/26/2011	2:49:16 PM	PHl3 MFC set to  0.000000
4/26/2011	2:49:16 PM	SiCl4 MFC set to  0.000000
4/26/2011	2:49:16 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	2:49:17 PM	Tube furnace set to 0
4/26/2011	2:50:17 PM	H2 valve closed
4/26/2011	2:50:17 PM	BCl3 valve closed
4/26/2011	2:50:17 PM	PH3 valve closed
4/26/2011	2:50:17 PM	SiCl4 pre valve closed
4/26/2011	2:50:17 PM	SiCl4 post valve closed
4/26/2011	2:50:17 PM	Bubbler valve closed
4/26/2011	2:50:17 PM	Helium valve opened
4/26/2011	2:50:17 PM	Main Vac valve opened
4/26/2011	2:50:17 PM	Bypass valve opened
4/26/2011	2:50:17 PM	Helium MFC set to  100.000000
4/26/2011	2:50:17 PM	H2 MFC set to  0.000000
4/26/2011	2:50:17 PM	BCl3 MFC set to  0.000000
4/26/2011	2:50:17 PM	PHl3 MFC set to  0.000000
4/26/2011	2:50:17 PM	SiCl4 MFC set to  0.000000
4/26/2011	2:50:17 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	2:50:17 PM	Tube furnace set to 0
4/26/2011	2:51:17 PM	Helium valve closed
4/26/2011	2:51:17 PM	H2 valve closed
4/26/2011	2:51:17 PM	BCl3 valve closed
4/26/2011	2:51:17 PM	PH3 valve closed
4/26/2011	2:51:17 PM	SiCl4 pre valve closed
4/26/2011	2:51:17 PM	SiCl4 post valve closed
4/26/2011	2:51:17 PM	Bubbler valve closed
4/26/2011	2:51:17 PM	Main Vac valve opened
4/26/2011	2:51:17 PM	Bypass valve opened
4/26/2011	2:51:17 PM	Helium MFC set to  0.000000
4/26/2011	2:51:17 PM	H2 MFC set to  0.000000
4/26/2011	2:51:17 PM	BCl3 MFC set to  0.000000
4/26/2011	2:51:17 PM	PHl3 MFC set to  0.000000
4/26/2011	2:51:17 PM	SiCl4 MFC set to  0.000000
4/26/2011	2:51:17 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	2:51:17 PM	Tube furnace set to 0
4/26/2011	2:52:17 PM	H2 valve closed
4/26/2011	2:52:17 PM	BCl3 valve closed
4/26/2011	2:52:17 PM	PH3 valve closed
4/26/2011	2:52:17 PM	SiCl4 pre valve closed
4/26/2011	2:52:17 PM	SiCl4 post valve closed
4/26/2011	2:52:17 PM	Bubbler valve closed
4/26/2011	2:52:17 PM	Helium valve opened
4/26/2011	2:52:17 PM	Main Vac valve opened
4/26/2011	2:52:17 PM	Bypass valve opened
4/26/2011	2:52:17 PM	Helium MFC set to  100.000000
4/26/2011	2:52:17 PM	H2 MFC set to  0.000000
4/26/2011	2:52:17 PM	BCl3 MFC set to  0.000000
4/26/2011	2:52:17 PM	PHl3 MFC set to  0.000000
4/26/2011	2:52:17 PM	SiCl4 MFC set to  0.000000
4/26/2011	2:52:17 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	2:52:17 PM	Tube furnace set to 0
4/26/2011	2:53:17 PM	Helium valve closed
4/26/2011	2:53:17 PM	H2 valve closed
4/26/2011	2:53:17 PM	BCl3 valve closed
4/26/2011	2:53:17 PM	PH3 valve closed
4/26/2011	2:53:17 PM	SiCl4 pre valve closed
4/26/2011	2:53:17 PM	SiCl4 post valve closed
4/26/2011	2:53:17 PM	Bubbler valve closed
4/26/2011	2:53:17 PM	Main Vac valve opened
4/26/2011	2:53:17 PM	Bypass valve opened
4/26/2011	2:53:17 PM	Helium MFC set to  0.000000
4/26/2011	2:53:17 PM	H2 MFC set to  0.000000
4/26/2011	2:53:17 PM	BCl3 MFC set to  0.000000
4/26/2011	2:53:17 PM	PHl3 MFC set to  0.000000
4/26/2011	2:53:17 PM	SiCl4 MFC set to  0.000000
4/26/2011	2:53:17 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	2:53:17 PM	Tube furnace set to 0
4/26/2011	2:54:17 PM	H2 valve closed
4/26/2011	2:54:17 PM	BCl3 valve closed
4/26/2011	2:54:17 PM	PH3 valve closed
4/26/2011	2:54:17 PM	SiCl4 pre valve closed
4/26/2011	2:54:17 PM	SiCl4 post valve closed
4/26/2011	2:54:17 PM	Bubbler valve closed
4/26/2011	2:54:17 PM	Helium valve opened
4/26/2011	2:54:17 PM	Main Vac valve opened
4/26/2011	2:54:17 PM	Bypass valve opened
4/26/2011	2:54:17 PM	Helium MFC set to  100.000000
4/26/2011	2:54:17 PM	H2 MFC set to  0.000000
4/26/2011	2:54:17 PM	BCl3 MFC set to  0.000000
4/26/2011	2:54:17 PM	PHl3 MFC set to  0.000000
4/26/2011	2:54:17 PM	SiCl4 MFC set to  0.000000
4/26/2011	2:54:17 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	2:54:17 PM	Tube furnace set to 0
4/26/2011	2:55:18 PM	Helium valve closed
4/26/2011	2:55:18 PM	H2 valve closed
4/26/2011	2:55:18 PM	BCl3 valve closed
4/26/2011	2:55:18 PM	PH3 valve closed
4/26/2011	2:55:18 PM	SiCl4 pre valve closed
4/26/2011	2:55:18 PM	SiCl4 post valve closed
4/26/2011	2:55:18 PM	Bubbler valve closed
4/26/2011	2:55:18 PM	Main Vac valve opened
4/26/2011	2:55:18 PM	Bypass valve opened
4/26/2011	2:55:18 PM	Helium MFC set to  0.000000
4/26/2011	2:55:18 PM	H2 MFC set to  0.000000
4/26/2011	2:55:18 PM	BCl3 MFC set to  0.000000
4/26/2011	2:55:18 PM	PHl3 MFC set to  0.000000
4/26/2011	2:55:18 PM	SiCl4 MFC set to  0.000000
4/26/2011	2:55:18 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	2:55:18 PM	Tube furnace set to 0
4/26/2011	2:56:18 PM	H2 valve closed
4/26/2011	2:56:18 PM	BCl3 valve closed
4/26/2011	2:56:18 PM	PH3 valve closed
4/26/2011	2:56:18 PM	SiCl4 pre valve closed
4/26/2011	2:56:18 PM	SiCl4 post valve closed
4/26/2011	2:56:18 PM	Bubbler valve closed
4/26/2011	2:56:18 PM	Helium valve opened
4/26/2011	2:56:18 PM	Main Vac valve opened
4/26/2011	2:56:18 PM	Bypass valve opened
4/26/2011	2:56:18 PM	Helium MFC set to  100.000000
4/26/2011	2:56:18 PM	H2 MFC set to  0.000000
4/26/2011	2:56:18 PM	BCl3 MFC set to  0.000000
4/26/2011	2:56:18 PM	PHl3 MFC set to  0.000000
4/26/2011	2:56:18 PM	SiCl4 MFC set to  0.000000
4/26/2011	2:56:18 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	2:56:18 PM	Tube furnace set to 0
4/26/2011	2:57:18 PM	Helium valve closed
4/26/2011	2:57:18 PM	H2 valve closed
4/26/2011	2:57:18 PM	BCl3 valve closed
4/26/2011	2:57:18 PM	PH3 valve closed
4/26/2011	2:57:18 PM	SiCl4 pre valve closed
4/26/2011	2:57:18 PM	SiCl4 post valve closed
4/26/2011	2:57:18 PM	Bubbler valve closed
4/26/2011	2:57:18 PM	Main Vac valve opened
4/26/2011	2:57:18 PM	Bypass valve opened
4/26/2011	2:57:18 PM	Helium MFC set to  0.000000
4/26/2011	2:57:18 PM	H2 MFC set to  0.000000
4/26/2011	2:57:18 PM	BCl3 MFC set to  0.000000
4/26/2011	2:57:18 PM	PHl3 MFC set to  0.000000
4/26/2011	2:57:18 PM	SiCl4 MFC set to  0.000000
4/26/2011	2:57:18 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	2:57:18 PM	Tube furnace set to 0
4/26/2011	2:57:19 PM	Run finished at 2:57 PM
4/26/2011	2:57:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/26/2011	3:09:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/26/2011	3:09:02 PM	Recipe started at 3:09 PM
4/26/2011	3:09:02 PM	Helium valve closed
4/26/2011	3:09:02 PM	H2 valve closed
4/26/2011	3:09:02 PM	BCl3 valve closed
4/26/2011	3:09:02 PM	PH3 valve closed
4/26/2011	3:09:02 PM	SiCl4 pre valve closed
4/26/2011	3:09:02 PM	SiCl4 post valve closed
4/26/2011	3:09:02 PM	Main Vac valve closed
4/26/2011	3:09:02 PM	Bypass valve closed
4/26/2011	3:09:02 PM	Bubbler valve closed
4/26/2011	3:09:02 PM	Helium MFC set to  0.000000
4/26/2011	3:09:02 PM	H2 MFC set to  0.000000
4/26/2011	3:09:02 PM	BCl3 MFC set to  0.000000
4/26/2011	3:09:02 PM	PHl3 MFC set to  0.000000
4/26/2011	3:09:02 PM	SiCl4 MFC set to  0.000000
4/26/2011	3:09:02 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	3:09:02 PM	Tube furnace set to 0
4/26/2011	3:09:02 PM	Run finished at 3:09 PM
4/26/2011	3:09:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/26/2011	3:09:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/26/2011	3:09:17 PM	Recipe started at 3:09 PM
4/26/2011	3:09:17 PM	Helium valve closed
4/26/2011	3:09:17 PM	H2 valve closed
4/26/2011	3:09:17 PM	BCl3 valve closed
4/26/2011	3:09:17 PM	PH3 valve closed
4/26/2011	3:09:18 PM	SiCl4 pre valve closed
4/26/2011	3:09:18 PM	SiCl4 post valve closed
4/26/2011	3:09:18 PM	Main Vac valve closed
4/26/2011	3:09:18 PM	Bubbler valve closed
4/26/2011	3:09:18 PM	Bypass valve opened
4/26/2011	3:09:18 PM	Helium MFC set to  0.000000
4/26/2011	3:09:18 PM	H2 MFC set to  0.000000
4/26/2011	3:09:18 PM	BCl3 MFC set to  0.000000
4/26/2011	3:09:18 PM	PHl3 MFC set to  0.000000
4/26/2011	3:09:18 PM	SiCl4 MFC set to  0.000000
4/26/2011	3:09:18 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	3:09:18 PM	Tube furnace set to 0
4/26/2011	3:09:18 PM	Helium valve closed
4/26/2011	3:09:18 PM	H2 valve closed
4/26/2011	3:09:18 PM	BCl3 valve closed
4/26/2011	3:09:18 PM	PH3 valve closed
4/26/2011	3:09:18 PM	SiCl4 pre valve closed
4/26/2011	3:09:18 PM	SiCl4 post valve closed
4/26/2011	3:09:18 PM	Bubbler valve closed
4/26/2011	3:09:18 PM	Main Vac valve opened
4/26/2011	3:09:18 PM	Bypass valve opened
4/26/2011	3:09:18 PM	Helium MFC set to  0.000000
4/26/2011	3:09:18 PM	H2 MFC set to  0.000000
4/26/2011	3:09:18 PM	BCl3 MFC set to  0.000000
4/26/2011	3:09:18 PM	PHl3 MFC set to  0.000000
4/26/2011	3:09:18 PM	SiCl4 MFC set to  0.000000
4/26/2011	3:09:18 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	3:09:18 PM	Tube furnace set to 0
4/26/2011	3:09:18 PM	Run finished at 3:09 PM
4/26/2011	3:09:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/26/2011	3:10:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/26/2011	3:10:34 PM	Recipe started at 3:10 PM
4/26/2011	3:10:34 PM	Helium valve closed
4/26/2011	3:10:34 PM	H2 valve closed
4/26/2011	3:10:34 PM	BCl3 valve closed
4/26/2011	3:10:34 PM	PH3 valve closed
4/26/2011	3:10:34 PM	SiCl4 pre valve closed
4/26/2011	3:10:34 PM	SiCl4 post valve closed
4/26/2011	3:10:34 PM	Main Vac valve closed
4/26/2011	3:10:34 PM	Bubbler valve closed
4/26/2011	3:10:34 PM	Bypass valve opened
4/26/2011	3:10:34 PM	Helium MFC set to  0.000000
4/26/2011	3:10:34 PM	H2 MFC set to  0.000000
4/26/2011	3:10:34 PM	BCl3 MFC set to  0.000000
4/26/2011	3:10:34 PM	PHl3 MFC set to  0.000000
4/26/2011	3:10:34 PM	SiCl4 MFC set to  0.000000
4/26/2011	3:10:34 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	3:10:34 PM	Tube furnace set to 0
4/26/2011	3:10:34 PM	Helium valve closed
4/26/2011	3:10:34 PM	H2 valve closed
4/26/2011	3:10:34 PM	BCl3 valve closed
4/26/2011	3:10:34 PM	PH3 valve closed
4/26/2011	3:10:34 PM	SiCl4 pre valve closed
4/26/2011	3:10:34 PM	SiCl4 post valve closed
4/26/2011	3:10:34 PM	Bubbler valve closed
4/26/2011	3:10:34 PM	Main Vac valve opened
4/26/2011	3:10:34 PM	Bypass valve opened
4/26/2011	3:10:34 PM	Helium MFC set to  0.000000
4/26/2011	3:10:34 PM	H2 MFC set to  0.000000
4/26/2011	3:10:34 PM	BCl3 MFC set to  0.000000
4/26/2011	3:10:34 PM	PHl3 MFC set to  0.000000
4/26/2011	3:10:34 PM	SiCl4 MFC set to  0.000000
4/26/2011	3:10:34 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	3:10:34 PM	Tube furnace set to 0
4/26/2011	3:10:43 PM	H2 valve closed
4/26/2011	3:10:43 PM	BCl3 valve closed
4/26/2011	3:10:43 PM	PH3 valve closed
4/26/2011	3:10:43 PM	SiCl4 pre valve closed
4/26/2011	3:10:43 PM	SiCl4 post valve closed
4/26/2011	3:10:43 PM	Bubbler valve closed
4/26/2011	3:10:43 PM	Helium valve opened
4/26/2011	3:10:43 PM	Main Vac valve opened
4/26/2011	3:10:43 PM	Bypass valve opened
4/26/2011	3:10:43 PM	Helium MFC set to  100.000000
4/26/2011	3:10:43 PM	H2 MFC set to  0.000000
4/26/2011	3:10:43 PM	BCl3 MFC set to  0.000000
4/26/2011	3:10:43 PM	PHl3 MFC set to  0.000000
4/26/2011	3:10:43 PM	SiCl4 MFC set to  0.000000
4/26/2011	3:10:43 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	3:10:43 PM	Tube furnace set to 0
4/26/2011	3:11:43 PM	Helium valve closed
4/26/2011	3:11:43 PM	H2 valve closed
4/26/2011	3:11:43 PM	BCl3 valve closed
4/26/2011	3:11:43 PM	PH3 valve closed
4/26/2011	3:11:43 PM	SiCl4 pre valve closed
4/26/2011	3:11:43 PM	SiCl4 post valve closed
4/26/2011	3:11:43 PM	Bubbler valve closed
4/26/2011	3:11:43 PM	Main Vac valve opened
4/26/2011	3:11:43 PM	Bypass valve opened
4/26/2011	3:11:43 PM	Helium MFC set to  0.000000
4/26/2011	3:11:43 PM	H2 MFC set to  0.000000
4/26/2011	3:11:43 PM	BCl3 MFC set to  0.000000
4/26/2011	3:11:43 PM	PHl3 MFC set to  0.000000
4/26/2011	3:11:43 PM	SiCl4 MFC set to  0.000000
4/26/2011	3:11:43 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	3:11:43 PM	Tube furnace set to 0
4/26/2011	3:12:43 PM	H2 valve closed
4/26/2011	3:12:43 PM	BCl3 valve closed
4/26/2011	3:12:43 PM	PH3 valve closed
4/26/2011	3:12:43 PM	SiCl4 pre valve closed
4/26/2011	3:12:43 PM	SiCl4 post valve closed
4/26/2011	3:12:43 PM	Bubbler valve closed
4/26/2011	3:12:43 PM	Helium valve opened
4/26/2011	3:12:43 PM	Main Vac valve opened
4/26/2011	3:12:43 PM	Bypass valve opened
4/26/2011	3:12:43 PM	Helium MFC set to  100.000000
4/26/2011	3:12:43 PM	H2 MFC set to  0.000000
4/26/2011	3:12:43 PM	BCl3 MFC set to  0.000000
4/26/2011	3:12:43 PM	PHl3 MFC set to  0.000000
4/26/2011	3:12:43 PM	SiCl4 MFC set to  0.000000
4/26/2011	3:12:43 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	3:12:43 PM	Tube furnace set to 0
4/26/2011	3:13:43 PM	Helium valve closed
4/26/2011	3:13:43 PM	H2 valve closed
4/26/2011	3:13:43 PM	BCl3 valve closed
4/26/2011	3:13:43 PM	PH3 valve closed
4/26/2011	3:13:43 PM	SiCl4 pre valve closed
4/26/2011	3:13:43 PM	SiCl4 post valve closed
4/26/2011	3:13:43 PM	Bubbler valve closed
4/26/2011	3:13:43 PM	Main Vac valve opened
4/26/2011	3:13:43 PM	Bypass valve opened
4/26/2011	3:13:43 PM	Helium MFC set to  0.000000
4/26/2011	3:13:43 PM	H2 MFC set to  0.000000
4/26/2011	3:13:43 PM	BCl3 MFC set to  0.000000
4/26/2011	3:13:43 PM	PHl3 MFC set to  0.000000
4/26/2011	3:13:43 PM	SiCl4 MFC set to  0.000000
4/26/2011	3:13:43 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	3:13:43 PM	Tube furnace set to 0
4/26/2011	3:14:44 PM	H2 valve closed
4/26/2011	3:14:44 PM	BCl3 valve closed
4/26/2011	3:14:44 PM	PH3 valve closed
4/26/2011	3:14:44 PM	SiCl4 pre valve closed
4/26/2011	3:14:44 PM	SiCl4 post valve closed
4/26/2011	3:14:44 PM	Bubbler valve closed
4/26/2011	3:14:44 PM	Helium valve opened
4/26/2011	3:14:44 PM	Main Vac valve opened
4/26/2011	3:14:44 PM	Bypass valve opened
4/26/2011	3:14:44 PM	Helium MFC set to  100.000000
4/26/2011	3:14:44 PM	H2 MFC set to  0.000000
4/26/2011	3:14:44 PM	BCl3 MFC set to  0.000000
4/26/2011	3:14:44 PM	PHl3 MFC set to  0.000000
4/26/2011	3:14:44 PM	SiCl4 MFC set to  0.000000
4/26/2011	3:14:44 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	3:14:44 PM	Tube furnace set to 0
4/26/2011	3:15:44 PM	Helium valve closed
4/26/2011	3:15:44 PM	H2 valve closed
4/26/2011	3:15:44 PM	BCl3 valve closed
4/26/2011	3:15:44 PM	PH3 valve closed
4/26/2011	3:15:44 PM	SiCl4 pre valve closed
4/26/2011	3:15:44 PM	SiCl4 post valve closed
4/26/2011	3:15:44 PM	Bubbler valve closed
4/26/2011	3:15:44 PM	Main Vac valve opened
4/26/2011	3:15:44 PM	Bypass valve opened
4/26/2011	3:15:44 PM	Helium MFC set to  0.000000
4/26/2011	3:15:44 PM	H2 MFC set to  0.000000
4/26/2011	3:15:44 PM	BCl3 MFC set to  0.000000
4/26/2011	3:15:44 PM	PHl3 MFC set to  0.000000
4/26/2011	3:15:44 PM	SiCl4 MFC set to  0.000000
4/26/2011	3:15:44 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	3:15:44 PM	Tube furnace set to 0
4/26/2011	3:16:44 PM	H2 valve closed
4/26/2011	3:16:44 PM	BCl3 valve closed
4/26/2011	3:16:44 PM	PH3 valve closed
4/26/2011	3:16:44 PM	SiCl4 pre valve closed
4/26/2011	3:16:44 PM	SiCl4 post valve closed
4/26/2011	3:16:44 PM	Bubbler valve closed
4/26/2011	3:16:44 PM	Helium valve opened
4/26/2011	3:16:44 PM	Main Vac valve opened
4/26/2011	3:16:44 PM	Bypass valve opened
4/26/2011	3:16:44 PM	Helium MFC set to  100.000000
4/26/2011	3:16:44 PM	H2 MFC set to  0.000000
4/26/2011	3:16:44 PM	BCl3 MFC set to  0.000000
4/26/2011	3:16:44 PM	PHl3 MFC set to  0.000000
4/26/2011	3:16:44 PM	SiCl4 MFC set to  0.000000
4/26/2011	3:16:44 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	3:16:44 PM	Tube furnace set to 0
4/26/2011	3:17:44 PM	Helium valve closed
4/26/2011	3:17:44 PM	H2 valve closed
4/26/2011	3:17:44 PM	BCl3 valve closed
4/26/2011	3:17:44 PM	PH3 valve closed
4/26/2011	3:17:44 PM	SiCl4 pre valve closed
4/26/2011	3:17:44 PM	SiCl4 post valve closed
4/26/2011	3:17:44 PM	Bubbler valve closed
4/26/2011	3:17:44 PM	Main Vac valve opened
4/26/2011	3:17:44 PM	Bypass valve opened
4/26/2011	3:17:44 PM	Helium MFC set to  0.000000
4/26/2011	3:17:44 PM	H2 MFC set to  0.000000
4/26/2011	3:17:44 PM	BCl3 MFC set to  0.000000
4/26/2011	3:17:44 PM	PHl3 MFC set to  0.000000
4/26/2011	3:17:44 PM	SiCl4 MFC set to  0.000000
4/26/2011	3:17:44 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	3:17:44 PM	Tube furnace set to 0
4/26/2011	3:18:44 PM	H2 valve closed
4/26/2011	3:18:44 PM	BCl3 valve closed
4/26/2011	3:18:44 PM	PH3 valve closed
4/26/2011	3:18:44 PM	SiCl4 pre valve closed
4/26/2011	3:18:44 PM	SiCl4 post valve closed
4/26/2011	3:18:44 PM	Bubbler valve closed
4/26/2011	3:18:44 PM	Helium valve opened
4/26/2011	3:18:44 PM	Main Vac valve opened
4/26/2011	3:18:44 PM	Bypass valve opened
4/26/2011	3:18:44 PM	Helium MFC set to  100.000000
4/26/2011	3:18:44 PM	H2 MFC set to  0.000000
4/26/2011	3:18:44 PM	BCl3 MFC set to  0.000000
4/26/2011	3:18:44 PM	PHl3 MFC set to  0.000000
4/26/2011	3:18:44 PM	SiCl4 MFC set to  0.000000
4/26/2011	3:18:44 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	3:18:44 PM	Tube furnace set to 0
4/26/2011	3:19:44 PM	Helium valve closed
4/26/2011	3:19:45 PM	H2 valve closed
4/26/2011	3:19:45 PM	BCl3 valve closed
4/26/2011	3:19:45 PM	PH3 valve closed
4/26/2011	3:19:45 PM	SiCl4 pre valve closed
4/26/2011	3:19:45 PM	SiCl4 post valve closed
4/26/2011	3:19:45 PM	Bubbler valve closed
4/26/2011	3:19:45 PM	Main Vac valve opened
4/26/2011	3:19:45 PM	Bypass valve opened
4/26/2011	3:19:45 PM	Helium MFC set to  0.000000
4/26/2011	3:19:45 PM	H2 MFC set to  0.000000
4/26/2011	3:19:45 PM	BCl3 MFC set to  0.000000
4/26/2011	3:19:45 PM	PHl3 MFC set to  0.000000
4/26/2011	3:19:45 PM	SiCl4 MFC set to  0.000000
4/26/2011	3:19:45 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	3:19:45 PM	Tube furnace set to 0
4/26/2011	3:20:45 PM	H2 valve closed
4/26/2011	3:20:45 PM	BCl3 valve closed
4/26/2011	3:20:45 PM	PH3 valve closed
4/26/2011	3:20:45 PM	SiCl4 pre valve closed
4/26/2011	3:20:45 PM	SiCl4 post valve closed
4/26/2011	3:20:45 PM	Bubbler valve closed
4/26/2011	3:20:45 PM	Helium valve opened
4/26/2011	3:20:45 PM	Main Vac valve opened
4/26/2011	3:20:45 PM	Bypass valve opened
4/26/2011	3:20:45 PM	Helium MFC set to  100.000000
4/26/2011	3:20:45 PM	H2 MFC set to  0.000000
4/26/2011	3:20:45 PM	BCl3 MFC set to  0.000000
4/26/2011	3:20:45 PM	PHl3 MFC set to  0.000000
4/26/2011	3:20:45 PM	SiCl4 MFC set to  0.000000
4/26/2011	3:20:45 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	3:20:45 PM	Tube furnace set to 0
4/26/2011	3:21:45 PM	Helium valve closed
4/26/2011	3:21:45 PM	H2 valve closed
4/26/2011	3:21:45 PM	BCl3 valve closed
4/26/2011	3:21:45 PM	PH3 valve closed
4/26/2011	3:21:45 PM	SiCl4 pre valve closed
4/26/2011	3:21:45 PM	SiCl4 post valve closed
4/26/2011	3:21:45 PM	Bubbler valve closed
4/26/2011	3:21:45 PM	Main Vac valve opened
4/26/2011	3:21:45 PM	Bypass valve opened
4/26/2011	3:21:45 PM	Helium MFC set to  0.000000
4/26/2011	3:21:45 PM	H2 MFC set to  0.000000
4/26/2011	3:21:45 PM	BCl3 MFC set to  0.000000
4/26/2011	3:21:45 PM	PHl3 MFC set to  0.000000
4/26/2011	3:21:45 PM	SiCl4 MFC set to  0.000000
4/26/2011	3:21:45 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	3:21:45 PM	Tube furnace set to 0
4/26/2011	3:22:45 PM	H2 valve closed
4/26/2011	3:22:45 PM	BCl3 valve closed
4/26/2011	3:22:45 PM	PH3 valve closed
4/26/2011	3:22:45 PM	SiCl4 pre valve closed
4/26/2011	3:22:45 PM	SiCl4 post valve closed
4/26/2011	3:22:45 PM	Bubbler valve closed
4/26/2011	3:22:45 PM	Helium valve opened
4/26/2011	3:22:45 PM	Main Vac valve opened
4/26/2011	3:22:45 PM	Bypass valve opened
4/26/2011	3:22:45 PM	Helium MFC set to  100.000000
4/26/2011	3:22:45 PM	H2 MFC set to  0.000000
4/26/2011	3:22:45 PM	BCl3 MFC set to  0.000000
4/26/2011	3:22:45 PM	PHl3 MFC set to  0.000000
4/26/2011	3:22:45 PM	SiCl4 MFC set to  0.000000
4/26/2011	3:22:45 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	3:22:45 PM	Tube furnace set to 0
4/26/2011	3:23:45 PM	Helium valve closed
4/26/2011	3:23:45 PM	H2 valve closed
4/26/2011	3:23:45 PM	BCl3 valve closed
4/26/2011	3:23:45 PM	PH3 valve closed
4/26/2011	3:23:45 PM	SiCl4 pre valve closed
4/26/2011	3:23:45 PM	SiCl4 post valve closed
4/26/2011	3:23:45 PM	Bubbler valve closed
4/26/2011	3:23:45 PM	Main Vac valve opened
4/26/2011	3:23:45 PM	Bypass valve opened
4/26/2011	3:23:45 PM	Helium MFC set to  0.000000
4/26/2011	3:23:45 PM	H2 MFC set to  0.000000
4/26/2011	3:23:45 PM	BCl3 MFC set to  0.000000
4/26/2011	3:23:45 PM	PHl3 MFC set to  0.000000
4/26/2011	3:23:45 PM	SiCl4 MFC set to  0.000000
4/26/2011	3:23:45 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	3:23:45 PM	Tube furnace set to 0
4/26/2011	3:24:45 PM	H2 valve closed
4/26/2011	3:24:45 PM	BCl3 valve closed
4/26/2011	3:24:45 PM	PH3 valve closed
4/26/2011	3:24:45 PM	SiCl4 pre valve closed
4/26/2011	3:24:45 PM	SiCl4 post valve closed
4/26/2011	3:24:45 PM	Bubbler valve closed
4/26/2011	3:24:45 PM	Helium valve opened
4/26/2011	3:24:45 PM	Main Vac valve opened
4/26/2011	3:24:45 PM	Bypass valve opened
4/26/2011	3:24:45 PM	Helium MFC set to  100.000000
4/26/2011	3:24:45 PM	H2 MFC set to  0.000000
4/26/2011	3:24:45 PM	BCl3 MFC set to  0.000000
4/26/2011	3:24:45 PM	PHl3 MFC set to  0.000000
4/26/2011	3:24:46 PM	SiCl4 MFC set to  0.000000
4/26/2011	3:24:46 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	3:24:46 PM	Tube furnace set to 0
4/26/2011	3:25:46 PM	Helium valve closed
4/26/2011	3:25:46 PM	H2 valve closed
4/26/2011	3:25:46 PM	BCl3 valve closed
4/26/2011	3:25:46 PM	PH3 valve closed
4/26/2011	3:25:46 PM	SiCl4 pre valve closed
4/26/2011	3:25:46 PM	SiCl4 post valve closed
4/26/2011	3:25:46 PM	Bubbler valve closed
4/26/2011	3:25:46 PM	Main Vac valve opened
4/26/2011	3:25:46 PM	Bypass valve opened
4/26/2011	3:25:46 PM	Helium MFC set to  0.000000
4/26/2011	3:25:46 PM	H2 MFC set to  0.000000
4/26/2011	3:25:46 PM	BCl3 MFC set to  0.000000
4/26/2011	3:25:46 PM	PHl3 MFC set to  0.000000
4/26/2011	3:25:46 PM	SiCl4 MFC set to  0.000000
4/26/2011	3:25:46 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	3:25:46 PM	Tube furnace set to 0
4/26/2011	3:26:46 PM	H2 valve closed
4/26/2011	3:26:46 PM	BCl3 valve closed
4/26/2011	3:26:46 PM	PH3 valve closed
4/26/2011	3:26:46 PM	SiCl4 pre valve closed
4/26/2011	3:26:46 PM	SiCl4 post valve closed
4/26/2011	3:26:46 PM	Bubbler valve closed
4/26/2011	3:26:46 PM	Helium valve opened
4/26/2011	3:26:46 PM	Main Vac valve opened
4/26/2011	3:26:46 PM	Bypass valve opened
4/26/2011	3:26:46 PM	Helium MFC set to  100.000000
4/26/2011	3:26:46 PM	H2 MFC set to  0.000000
4/26/2011	3:26:46 PM	BCl3 MFC set to  0.000000
4/26/2011	3:26:46 PM	PHl3 MFC set to  0.000000
4/26/2011	3:26:46 PM	SiCl4 MFC set to  0.000000
4/26/2011	3:26:46 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	3:26:46 PM	Tube furnace set to 0
4/26/2011	3:27:46 PM	Helium valve closed
4/26/2011	3:27:46 PM	H2 valve closed
4/26/2011	3:27:46 PM	BCl3 valve closed
4/26/2011	3:27:46 PM	PH3 valve closed
4/26/2011	3:27:46 PM	SiCl4 pre valve closed
4/26/2011	3:27:46 PM	SiCl4 post valve closed
4/26/2011	3:27:46 PM	Bubbler valve closed
4/26/2011	3:27:46 PM	Main Vac valve opened
4/26/2011	3:27:46 PM	Bypass valve opened
4/26/2011	3:27:46 PM	Helium MFC set to  0.000000
4/26/2011	3:27:46 PM	H2 MFC set to  0.000000
4/26/2011	3:27:46 PM	BCl3 MFC set to  0.000000
4/26/2011	3:27:46 PM	PHl3 MFC set to  0.000000
4/26/2011	3:27:46 PM	SiCl4 MFC set to  0.000000
4/26/2011	3:27:46 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	3:27:46 PM	Tube furnace set to 0
4/26/2011	3:28:46 PM	H2 valve closed
4/26/2011	3:28:46 PM	BCl3 valve closed
4/26/2011	3:28:46 PM	PH3 valve closed
4/26/2011	3:28:46 PM	SiCl4 pre valve closed
4/26/2011	3:28:46 PM	SiCl4 post valve closed
4/26/2011	3:28:46 PM	Bubbler valve closed
4/26/2011	3:28:46 PM	Helium valve opened
4/26/2011	3:28:46 PM	Main Vac valve opened
4/26/2011	3:28:46 PM	Bypass valve opened
4/26/2011	3:28:46 PM	Helium MFC set to  100.000000
4/26/2011	3:28:46 PM	H2 MFC set to  0.000000
4/26/2011	3:28:46 PM	BCl3 MFC set to  0.000000
4/26/2011	3:28:46 PM	PHl3 MFC set to  0.000000
4/26/2011	3:28:46 PM	SiCl4 MFC set to  0.000000
4/26/2011	3:28:46 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	3:28:46 PM	Tube furnace set to 0
4/26/2011	3:29:46 PM	Helium valve closed
4/26/2011	3:29:46 PM	H2 valve closed
4/26/2011	3:29:46 PM	BCl3 valve closed
4/26/2011	3:29:46 PM	PH3 valve closed
4/26/2011	3:29:46 PM	SiCl4 pre valve closed
4/26/2011	3:29:46 PM	SiCl4 post valve closed
4/26/2011	3:29:46 PM	Bubbler valve closed
4/26/2011	3:29:46 PM	Main Vac valve opened
4/26/2011	3:29:46 PM	Bypass valve opened
4/26/2011	3:29:46 PM	Helium MFC set to  0.000000
4/26/2011	3:29:46 PM	H2 MFC set to  0.000000
4/26/2011	3:29:46 PM	BCl3 MFC set to  0.000000
4/26/2011	3:29:46 PM	PHl3 MFC set to  0.000000
4/26/2011	3:29:46 PM	SiCl4 MFC set to  0.000000
4/26/2011	3:29:46 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	3:29:47 PM	Tube furnace set to 0
4/26/2011	3:29:48 PM	Run finished at 3:29 PM
4/26/2011	3:29:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/26/2011	5:37:38 PM	Recipe started at 5:37 PM
4/26/2011	5:37:38 PM	Helium valve closed
4/26/2011	5:37:38 PM	BCl3 valve closed
4/26/2011	5:37:38 PM	PH3 valve closed
4/26/2011	5:37:38 PM	SiCl4 pre valve closed
4/26/2011	5:37:38 PM	SiCl4 post valve closed
4/26/2011	5:37:38 PM	Main Vac valve closed
4/26/2011	5:37:38 PM	Bypass valve closed
4/26/2011	5:37:38 PM	Bubbler valve closed
4/26/2011	5:37:38 PM	H2 valve opened
4/26/2011	5:37:38 PM	Helium MFC set to  0.000000
4/26/2011	5:37:38 PM	H2 MFC set to  500.000000
4/26/2011	5:37:38 PM	BCl3 MFC set to  0.000000
4/26/2011	5:37:38 PM	PHl3 MFC set to  0.000000
4/26/2011	5:37:38 PM	SiCl4 MFC set to  0.000000
4/26/2011	5:37:38 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	5:37:38 PM	Tube furnace set to 0
4/26/2011	5:39:00 PM	Helium valve closed
4/26/2011	5:39:00 PM	BCl3 valve closed
4/26/2011	5:39:00 PM	PH3 valve closed
4/26/2011	5:39:00 PM	SiCl4 pre valve closed
4/26/2011	5:39:00 PM	SiCl4 post valve closed
4/26/2011	5:39:00 PM	Main Vac valve closed
4/26/2011	5:39:00 PM	Bypass valve closed
4/26/2011	5:39:00 PM	H2 valve opened
4/26/2011	5:39:00 PM	Bubbler valve opened
4/26/2011	5:39:00 PM	Helium MFC set to  0.000000
4/26/2011	5:39:00 PM	H2 MFC set to  500.000000
4/26/2011	5:39:00 PM	BCl3 MFC set to  0.000000
4/26/2011	5:39:00 PM	PHl3 MFC set to  0.000000
4/26/2011	5:39:00 PM	SiCl4 MFC set to  0.000000
4/26/2011	5:39:00 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	5:39:01 PM	Tube furnace set to 1000
4/26/2011	5:59:01 PM	Helium valve closed
4/26/2011	5:59:01 PM	PH3 valve closed
4/26/2011	5:59:01 PM	Main Vac valve closed
4/26/2011	5:59:01 PM	Bypass valve closed
4/26/2011	5:59:01 PM	H2 valve opened
4/26/2011	5:59:01 PM	BCl3 valve opened
4/26/2011	5:59:01 PM	SiCl4 pre valve opened
4/26/2011	5:59:01 PM	SiCl4 post valve opened
4/26/2011	5:59:01 PM	Bubbler valve opened
4/26/2011	5:59:01 PM	Helium MFC set to  0.000000
4/26/2011	5:59:01 PM	H2 MFC set to  500.000000
4/26/2011	5:59:01 PM	BCl3 MFC set to  3.000000
4/26/2011	5:59:01 PM	PHl3 MFC set to  0.000000
4/26/2011	5:59:01 PM	SiCl4 MFC set to  50.000000
4/26/2011	5:59:01 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	5:59:01 PM	Tube furnace set to 1000
4/26/2011	6:19:01 PM	H2 valve closed
4/26/2011	6:19:01 PM	BCl3 valve closed
4/26/2011	6:19:01 PM	PH3 valve closed
4/26/2011	6:19:01 PM	SiCl4 pre valve closed
4/26/2011	6:19:01 PM	SiCl4 post valve closed
4/26/2011	6:19:01 PM	Main Vac valve closed
4/26/2011	6:19:01 PM	Bypass valve closed
4/26/2011	6:19:01 PM	Helium valve opened
4/26/2011	6:19:01 PM	Bubbler valve opened
4/26/2011	6:19:01 PM	Helium MFC set to  500.000000
4/26/2011	6:19:01 PM	H2 MFC set to  0.000000
4/26/2011	6:19:01 PM	BCl3 MFC set to  0.000000
4/26/2011	6:19:01 PM	PHl3 MFC set to  0.000000
4/26/2011	6:19:01 PM	SiCl4 MFC set to  0.000000
4/26/2011	6:19:01 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	6:19:01 PM	Tube furnace set to 0
4/26/2011	6:39:01 PM	Helium valve closed
4/26/2011	6:39:01 PM	H2 valve closed
4/26/2011	6:39:01 PM	BCl3 valve closed
4/26/2011	6:39:01 PM	PH3 valve closed
4/26/2011	6:39:01 PM	SiCl4 pre valve closed
4/26/2011	6:39:01 PM	SiCl4 post valve closed
4/26/2011	6:39:01 PM	Main Vac valve closed
4/26/2011	6:39:01 PM	Bypass valve closed
4/26/2011	6:39:01 PM	Bubbler valve closed
4/26/2011	6:39:01 PM	Helium MFC set to  0.000000
4/26/2011	6:39:01 PM	H2 MFC set to  0.000000
4/26/2011	6:39:01 PM	BCl3 MFC set to  0.000000
4/26/2011	6:39:01 PM	PHl3 MFC set to  0.000000
4/26/2011	6:39:01 PM	SiCl4 MFC set to  0.000000
4/26/2011	6:39:01 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	6:39:01 PM	Tube furnace set to 0
4/26/2011	6:39:01 PM	Run finished at 6:39 PM
4/26/2011	6:49:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/26/2011	6:49:54 PM	Recipe started at 6:49 PM
4/26/2011	6:49:54 PM	Helium valve closed
4/26/2011	6:49:54 PM	H2 valve closed
4/26/2011	6:49:54 PM	BCl3 valve closed
4/26/2011	6:49:54 PM	PH3 valve closed
4/26/2011	6:49:54 PM	SiCl4 pre valve closed
4/26/2011	6:49:54 PM	SiCl4 post valve closed
4/26/2011	6:49:54 PM	Main Vac valve closed
4/26/2011	6:49:54 PM	Bubbler valve closed
4/26/2011	6:49:54 PM	Bypass valve opened
4/26/2011	6:49:54 PM	Helium MFC set to  0.000000
4/26/2011	6:49:54 PM	H2 MFC set to  0.000000
4/26/2011	6:49:54 PM	BCl3 MFC set to  0.000000
4/26/2011	6:49:54 PM	PHl3 MFC set to  0.000000
4/26/2011	6:49:54 PM	SiCl4 MFC set to  0.000000
4/26/2011	6:49:54 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	6:49:54 PM	Tube furnace set to 0
4/26/2011	6:50:27 PM	Helium valve closed
4/26/2011	6:50:27 PM	H2 valve closed
4/26/2011	6:50:27 PM	BCl3 valve closed
4/26/2011	6:50:27 PM	PH3 valve closed
4/26/2011	6:50:27 PM	SiCl4 pre valve closed
4/26/2011	6:50:27 PM	SiCl4 post valve closed
4/26/2011	6:50:27 PM	Bubbler valve closed
4/26/2011	6:50:27 PM	Main Vac valve opened
4/26/2011	6:50:27 PM	Bypass valve opened
4/26/2011	6:50:27 PM	Helium MFC set to  0.000000
4/26/2011	6:50:27 PM	H2 MFC set to  0.000000
4/26/2011	6:50:27 PM	BCl3 MFC set to  0.000000
4/26/2011	6:50:27 PM	PHl3 MFC set to  0.000000
4/26/2011	6:50:27 PM	SiCl4 MFC set to  0.000000
4/26/2011	6:50:27 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	6:50:27 PM	Tube furnace set to 0
4/26/2011	6:51:27 PM	H2 valve closed
4/26/2011	6:51:27 PM	BCl3 valve closed
4/26/2011	6:51:27 PM	PH3 valve closed
4/26/2011	6:51:27 PM	SiCl4 pre valve closed
4/26/2011	6:51:27 PM	SiCl4 post valve closed
4/26/2011	6:51:27 PM	Bubbler valve closed
4/26/2011	6:51:27 PM	Helium valve opened
4/26/2011	6:51:27 PM	Main Vac valve opened
4/26/2011	6:51:27 PM	Bypass valve opened
4/26/2011	6:51:27 PM	Helium MFC set to  100.000000
4/26/2011	6:51:27 PM	H2 MFC set to  0.000000
4/26/2011	6:51:27 PM	BCl3 MFC set to  0.000000
4/26/2011	6:51:27 PM	PHl3 MFC set to  0.000000
4/26/2011	6:51:27 PM	SiCl4 MFC set to  0.000000
4/26/2011	6:51:27 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	6:51:28 PM	Tube furnace set to 0
4/26/2011	6:52:28 PM	Helium valve closed
4/26/2011	6:52:28 PM	H2 valve closed
4/26/2011	6:52:28 PM	BCl3 valve closed
4/26/2011	6:52:28 PM	PH3 valve closed
4/26/2011	6:52:28 PM	SiCl4 pre valve closed
4/26/2011	6:52:28 PM	SiCl4 post valve closed
4/26/2011	6:52:28 PM	Bubbler valve closed
4/26/2011	6:52:28 PM	Main Vac valve opened
4/26/2011	6:52:28 PM	Bypass valve opened
4/26/2011	6:52:28 PM	Helium MFC set to  0.000000
4/26/2011	6:52:28 PM	H2 MFC set to  0.000000
4/26/2011	6:52:28 PM	BCl3 MFC set to  0.000000
4/26/2011	6:52:28 PM	PHl3 MFC set to  0.000000
4/26/2011	6:52:28 PM	SiCl4 MFC set to  0.000000
4/26/2011	6:52:28 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	6:52:28 PM	Tube furnace set to 0
4/26/2011	6:53:28 PM	H2 valve closed
4/26/2011	6:53:28 PM	BCl3 valve closed
4/26/2011	6:53:28 PM	PH3 valve closed
4/26/2011	6:53:28 PM	SiCl4 pre valve closed
4/26/2011	6:53:28 PM	SiCl4 post valve closed
4/26/2011	6:53:28 PM	Bubbler valve closed
4/26/2011	6:53:28 PM	Helium valve opened
4/26/2011	6:53:28 PM	Main Vac valve opened
4/26/2011	6:53:28 PM	Bypass valve opened
4/26/2011	6:53:28 PM	Helium MFC set to  100.000000
4/26/2011	6:53:28 PM	H2 MFC set to  0.000000
4/26/2011	6:53:28 PM	BCl3 MFC set to  0.000000
4/26/2011	6:53:28 PM	PHl3 MFC set to  0.000000
4/26/2011	6:53:28 PM	SiCl4 MFC set to  0.000000
4/26/2011	6:53:28 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	6:53:28 PM	Tube furnace set to 0
4/26/2011	6:54:28 PM	Helium valve closed
4/26/2011	6:54:28 PM	H2 valve closed
4/26/2011	6:54:28 PM	BCl3 valve closed
4/26/2011	6:54:28 PM	PH3 valve closed
4/26/2011	6:54:28 PM	SiCl4 pre valve closed
4/26/2011	6:54:28 PM	SiCl4 post valve closed
4/26/2011	6:54:28 PM	Bubbler valve closed
4/26/2011	6:54:28 PM	Main Vac valve opened
4/26/2011	6:54:28 PM	Bypass valve opened
4/26/2011	6:54:28 PM	Helium MFC set to  0.000000
4/26/2011	6:54:28 PM	H2 MFC set to  0.000000
4/26/2011	6:54:28 PM	BCl3 MFC set to  0.000000
4/26/2011	6:54:28 PM	PHl3 MFC set to  0.000000
4/26/2011	6:54:28 PM	SiCl4 MFC set to  0.000000
4/26/2011	6:54:28 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	6:54:28 PM	Tube furnace set to 0
4/26/2011	6:55:28 PM	H2 valve closed
4/26/2011	6:55:28 PM	BCl3 valve closed
4/26/2011	6:55:28 PM	PH3 valve closed
4/26/2011	6:55:28 PM	SiCl4 pre valve closed
4/26/2011	6:55:28 PM	SiCl4 post valve closed
4/26/2011	6:55:28 PM	Bubbler valve closed
4/26/2011	6:55:28 PM	Helium valve opened
4/26/2011	6:55:28 PM	Main Vac valve opened
4/26/2011	6:55:28 PM	Bypass valve opened
4/26/2011	6:55:28 PM	Helium MFC set to  100.000000
4/26/2011	6:55:28 PM	H2 MFC set to  0.000000
4/26/2011	6:55:28 PM	BCl3 MFC set to  0.000000
4/26/2011	6:55:28 PM	PHl3 MFC set to  0.000000
4/26/2011	6:55:28 PM	SiCl4 MFC set to  0.000000
4/26/2011	6:55:28 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	6:55:28 PM	Tube furnace set to 0
4/26/2011	6:56:28 PM	Helium valve closed
4/26/2011	6:56:28 PM	H2 valve closed
4/26/2011	6:56:28 PM	BCl3 valve closed
4/26/2011	6:56:28 PM	PH3 valve closed
4/26/2011	6:56:28 PM	SiCl4 pre valve closed
4/26/2011	6:56:28 PM	SiCl4 post valve closed
4/26/2011	6:56:28 PM	Bubbler valve closed
4/26/2011	6:56:28 PM	Main Vac valve opened
4/26/2011	6:56:28 PM	Bypass valve opened
4/26/2011	6:56:28 PM	Helium MFC set to  0.000000
4/26/2011	6:56:28 PM	H2 MFC set to  0.000000
4/26/2011	6:56:28 PM	BCl3 MFC set to  0.000000
4/26/2011	6:56:28 PM	PHl3 MFC set to  0.000000
4/26/2011	6:56:28 PM	SiCl4 MFC set to  0.000000
4/26/2011	6:56:28 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	6:56:28 PM	Tube furnace set to 0
4/26/2011	6:57:29 PM	H2 valve closed
4/26/2011	6:57:29 PM	BCl3 valve closed
4/26/2011	6:57:29 PM	PH3 valve closed
4/26/2011	6:57:29 PM	SiCl4 pre valve closed
4/26/2011	6:57:29 PM	SiCl4 post valve closed
4/26/2011	6:57:29 PM	Bubbler valve closed
4/26/2011	6:57:29 PM	Helium valve opened
4/26/2011	6:57:29 PM	Main Vac valve opened
4/26/2011	6:57:29 PM	Bypass valve opened
4/26/2011	6:57:29 PM	Helium MFC set to  100.000000
4/26/2011	6:57:29 PM	H2 MFC set to  0.000000
4/26/2011	6:57:29 PM	BCl3 MFC set to  0.000000
4/26/2011	6:57:29 PM	PHl3 MFC set to  0.000000
4/26/2011	6:57:29 PM	SiCl4 MFC set to  0.000000
4/26/2011	6:57:29 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	6:57:29 PM	Tube furnace set to 0
4/26/2011	6:58:29 PM	Helium valve closed
4/26/2011	6:58:29 PM	H2 valve closed
4/26/2011	6:58:29 PM	BCl3 valve closed
4/26/2011	6:58:29 PM	PH3 valve closed
4/26/2011	6:58:29 PM	SiCl4 pre valve closed
4/26/2011	6:58:29 PM	SiCl4 post valve closed
4/26/2011	6:58:29 PM	Bubbler valve closed
4/26/2011	6:58:29 PM	Main Vac valve opened
4/26/2011	6:58:29 PM	Bypass valve opened
4/26/2011	6:58:29 PM	Helium MFC set to  0.000000
4/26/2011	6:58:29 PM	H2 MFC set to  0.000000
4/26/2011	6:58:29 PM	BCl3 MFC set to  0.000000
4/26/2011	6:58:29 PM	PHl3 MFC set to  0.000000
4/26/2011	6:58:29 PM	SiCl4 MFC set to  0.000000
4/26/2011	6:58:29 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	6:58:29 PM	Tube furnace set to 0
4/26/2011	6:59:29 PM	H2 valve closed
4/26/2011	6:59:29 PM	BCl3 valve closed
4/26/2011	6:59:29 PM	PH3 valve closed
4/26/2011	6:59:29 PM	SiCl4 pre valve closed
4/26/2011	6:59:29 PM	SiCl4 post valve closed
4/26/2011	6:59:29 PM	Bubbler valve closed
4/26/2011	6:59:29 PM	Helium valve opened
4/26/2011	6:59:29 PM	Main Vac valve opened
4/26/2011	6:59:29 PM	Bypass valve opened
4/26/2011	6:59:29 PM	Helium MFC set to  100.000000
4/26/2011	6:59:29 PM	H2 MFC set to  0.000000
4/26/2011	6:59:29 PM	BCl3 MFC set to  0.000000
4/26/2011	6:59:29 PM	PHl3 MFC set to  0.000000
4/26/2011	6:59:29 PM	SiCl4 MFC set to  0.000000
4/26/2011	6:59:29 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	6:59:29 PM	Tube furnace set to 0
4/26/2011	7:00:29 PM	Helium valve closed
4/26/2011	7:00:29 PM	H2 valve closed
4/26/2011	7:00:29 PM	BCl3 valve closed
4/26/2011	7:00:29 PM	PH3 valve closed
4/26/2011	7:00:29 PM	SiCl4 pre valve closed
4/26/2011	7:00:29 PM	SiCl4 post valve closed
4/26/2011	7:00:29 PM	Bubbler valve closed
4/26/2011	7:00:29 PM	Main Vac valve opened
4/26/2011	7:00:29 PM	Bypass valve opened
4/26/2011	7:00:29 PM	Helium MFC set to  0.000000
4/26/2011	7:00:29 PM	H2 MFC set to  0.000000
4/26/2011	7:00:29 PM	BCl3 MFC set to  0.000000
4/26/2011	7:00:29 PM	PHl3 MFC set to  0.000000
4/26/2011	7:00:29 PM	SiCl4 MFC set to  0.000000
4/26/2011	7:00:29 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	7:00:29 PM	Tube furnace set to 0
4/26/2011	7:01:29 PM	H2 valve closed
4/26/2011	7:01:29 PM	BCl3 valve closed
4/26/2011	7:01:29 PM	PH3 valve closed
4/26/2011	7:01:29 PM	SiCl4 pre valve closed
4/26/2011	7:01:29 PM	SiCl4 post valve closed
4/26/2011	7:01:29 PM	Bubbler valve closed
4/26/2011	7:01:29 PM	Helium valve opened
4/26/2011	7:01:29 PM	Main Vac valve opened
4/26/2011	7:01:29 PM	Bypass valve opened
4/26/2011	7:01:29 PM	Helium MFC set to  100.000000
4/26/2011	7:01:29 PM	H2 MFC set to  0.000000
4/26/2011	7:01:29 PM	BCl3 MFC set to  0.000000
4/26/2011	7:01:29 PM	PHl3 MFC set to  0.000000
4/26/2011	7:01:29 PM	SiCl4 MFC set to  0.000000
4/26/2011	7:01:29 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	7:01:29 PM	Tube furnace set to 0
4/26/2011	7:02:29 PM	Helium valve closed
4/26/2011	7:02:30 PM	H2 valve closed
4/26/2011	7:02:30 PM	BCl3 valve closed
4/26/2011	7:02:30 PM	PH3 valve closed
4/26/2011	7:02:30 PM	SiCl4 pre valve closed
4/26/2011	7:02:30 PM	SiCl4 post valve closed
4/26/2011	7:02:30 PM	Bubbler valve closed
4/26/2011	7:02:30 PM	Main Vac valve opened
4/26/2011	7:02:30 PM	Bypass valve opened
4/26/2011	7:02:30 PM	Helium MFC set to  0.000000
4/26/2011	7:02:30 PM	H2 MFC set to  0.000000
4/26/2011	7:02:30 PM	BCl3 MFC set to  0.000000
4/26/2011	7:02:30 PM	PHl3 MFC set to  0.000000
4/26/2011	7:02:30 PM	SiCl4 MFC set to  0.000000
4/26/2011	7:02:30 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	7:02:30 PM	Tube furnace set to 0
4/26/2011	7:03:30 PM	H2 valve closed
4/26/2011	7:03:30 PM	BCl3 valve closed
4/26/2011	7:03:30 PM	PH3 valve closed
4/26/2011	7:03:30 PM	SiCl4 pre valve closed
4/26/2011	7:03:30 PM	SiCl4 post valve closed
4/26/2011	7:03:30 PM	Bubbler valve closed
4/26/2011	7:03:30 PM	Helium valve opened
4/26/2011	7:03:30 PM	Main Vac valve opened
4/26/2011	7:03:30 PM	Bypass valve opened
4/26/2011	7:03:30 PM	Helium MFC set to  100.000000
4/26/2011	7:03:30 PM	H2 MFC set to  0.000000
4/26/2011	7:03:30 PM	BCl3 MFC set to  0.000000
4/26/2011	7:03:30 PM	PHl3 MFC set to  0.000000
4/26/2011	7:03:30 PM	SiCl4 MFC set to  0.000000
4/26/2011	7:03:30 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	7:03:30 PM	Tube furnace set to 0
4/26/2011	7:04:30 PM	Helium valve closed
4/26/2011	7:04:30 PM	H2 valve closed
4/26/2011	7:04:30 PM	BCl3 valve closed
4/26/2011	7:04:30 PM	PH3 valve closed
4/26/2011	7:04:30 PM	SiCl4 pre valve closed
4/26/2011	7:04:30 PM	SiCl4 post valve closed
4/26/2011	7:04:30 PM	Bubbler valve closed
4/26/2011	7:04:30 PM	Main Vac valve opened
4/26/2011	7:04:30 PM	Bypass valve opened
4/26/2011	7:04:30 PM	Helium MFC set to  0.000000
4/26/2011	7:04:30 PM	H2 MFC set to  0.000000
4/26/2011	7:04:30 PM	BCl3 MFC set to  0.000000
4/26/2011	7:04:30 PM	PHl3 MFC set to  0.000000
4/26/2011	7:04:30 PM	SiCl4 MFC set to  0.000000
4/26/2011	7:04:30 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	7:04:30 PM	Tube furnace set to 0
4/26/2011	7:05:30 PM	H2 valve closed
4/26/2011	7:05:30 PM	BCl3 valve closed
4/26/2011	7:05:30 PM	PH3 valve closed
4/26/2011	7:05:30 PM	SiCl4 pre valve closed
4/26/2011	7:05:30 PM	SiCl4 post valve closed
4/26/2011	7:05:30 PM	Bubbler valve closed
4/26/2011	7:05:30 PM	Helium valve opened
4/26/2011	7:05:30 PM	Main Vac valve opened
4/26/2011	7:05:30 PM	Bypass valve opened
4/26/2011	7:05:30 PM	Helium MFC set to  100.000000
4/26/2011	7:05:30 PM	H2 MFC set to  0.000000
4/26/2011	7:05:30 PM	BCl3 MFC set to  0.000000
4/26/2011	7:05:30 PM	PHl3 MFC set to  0.000000
4/26/2011	7:05:30 PM	SiCl4 MFC set to  0.000000
4/26/2011	7:05:30 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	7:05:30 PM	Tube furnace set to 0
4/26/2011	7:06:30 PM	Helium valve closed
4/26/2011	7:06:30 PM	H2 valve closed
4/26/2011	7:06:30 PM	BCl3 valve closed
4/26/2011	7:06:30 PM	PH3 valve closed
4/26/2011	7:06:30 PM	SiCl4 pre valve closed
4/26/2011	7:06:30 PM	SiCl4 post valve closed
4/26/2011	7:06:30 PM	Bubbler valve closed
4/26/2011	7:06:30 PM	Main Vac valve opened
4/26/2011	7:06:30 PM	Bypass valve opened
4/26/2011	7:06:30 PM	Helium MFC set to  0.000000
4/26/2011	7:06:30 PM	H2 MFC set to  0.000000
4/26/2011	7:06:30 PM	BCl3 MFC set to  0.000000
4/26/2011	7:06:30 PM	PHl3 MFC set to  0.000000
4/26/2011	7:06:30 PM	SiCl4 MFC set to  0.000000
4/26/2011	7:06:30 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	7:06:30 PM	Tube furnace set to 0
4/26/2011	7:07:30 PM	H2 valve closed
4/26/2011	7:07:30 PM	BCl3 valve closed
4/26/2011	7:07:30 PM	PH3 valve closed
4/26/2011	7:07:30 PM	SiCl4 pre valve closed
4/26/2011	7:07:30 PM	SiCl4 post valve closed
4/26/2011	7:07:30 PM	Bubbler valve closed
4/26/2011	7:07:30 PM	Helium valve opened
4/26/2011	7:07:30 PM	Main Vac valve opened
4/26/2011	7:07:30 PM	Bypass valve opened
4/26/2011	7:07:30 PM	Helium MFC set to  100.000000
4/26/2011	7:07:30 PM	H2 MFC set to  0.000000
4/26/2011	7:07:30 PM	BCl3 MFC set to  0.000000
4/26/2011	7:07:31 PM	PHl3 MFC set to  0.000000
4/26/2011	7:07:31 PM	SiCl4 MFC set to  0.000000
4/26/2011	7:07:31 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	7:07:31 PM	Tube furnace set to 0
4/26/2011	7:08:31 PM	Helium valve closed
4/26/2011	7:08:31 PM	H2 valve closed
4/26/2011	7:08:31 PM	BCl3 valve closed
4/26/2011	7:08:31 PM	PH3 valve closed
4/26/2011	7:08:31 PM	SiCl4 pre valve closed
4/26/2011	7:08:31 PM	SiCl4 post valve closed
4/26/2011	7:08:31 PM	Bubbler valve closed
4/26/2011	7:08:31 PM	Main Vac valve opened
4/26/2011	7:08:31 PM	Bypass valve opened
4/26/2011	7:08:31 PM	Helium MFC set to  0.000000
4/26/2011	7:08:31 PM	H2 MFC set to  0.000000
4/26/2011	7:08:31 PM	BCl3 MFC set to  0.000000
4/26/2011	7:08:31 PM	PHl3 MFC set to  0.000000
4/26/2011	7:08:31 PM	SiCl4 MFC set to  0.000000
4/26/2011	7:08:31 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	7:08:31 PM	Tube furnace set to 0
4/26/2011	7:09:31 PM	H2 valve closed
4/26/2011	7:09:31 PM	BCl3 valve closed
4/26/2011	7:09:31 PM	PH3 valve closed
4/26/2011	7:09:31 PM	SiCl4 pre valve closed
4/26/2011	7:09:31 PM	SiCl4 post valve closed
4/26/2011	7:09:31 PM	Bubbler valve closed
4/26/2011	7:09:31 PM	Helium valve opened
4/26/2011	7:09:31 PM	Main Vac valve opened
4/26/2011	7:09:31 PM	Bypass valve opened
4/26/2011	7:09:31 PM	Helium MFC set to  100.000000
4/26/2011	7:09:31 PM	H2 MFC set to  0.000000
4/26/2011	7:09:31 PM	BCl3 MFC set to  0.000000
4/26/2011	7:09:31 PM	PHl3 MFC set to  0.000000
4/26/2011	7:09:31 PM	SiCl4 MFC set to  0.000000
4/26/2011	7:09:31 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	7:09:31 PM	Tube furnace set to 0
4/26/2011	7:10:31 PM	Helium valve closed
4/26/2011	7:10:31 PM	H2 valve closed
4/26/2011	7:10:31 PM	BCl3 valve closed
4/26/2011	7:10:31 PM	PH3 valve closed
4/26/2011	7:10:31 PM	SiCl4 pre valve closed
4/26/2011	7:10:31 PM	SiCl4 post valve closed
4/26/2011	7:10:31 PM	Bubbler valve closed
4/26/2011	7:10:31 PM	Main Vac valve opened
4/26/2011	7:10:31 PM	Bypass valve opened
4/26/2011	7:10:31 PM	Helium MFC set to  0.000000
4/26/2011	7:10:31 PM	H2 MFC set to  0.000000
4/26/2011	7:10:31 PM	BCl3 MFC set to  0.000000
4/26/2011	7:10:31 PM	PHl3 MFC set to  0.000000
4/26/2011	7:10:31 PM	SiCl4 MFC set to  0.000000
4/26/2011	7:10:31 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	7:10:31 PM	Tube furnace set to 0
4/26/2011	7:10:32 PM	Run finished at 7:10 PM
4/26/2011	7:10:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/26/2011	7:46:09 PM	Recipe started at 7:46 PM
4/26/2011	7:46:09 PM	Helium valve closed
4/26/2011	7:46:09 PM	BCl3 valve closed
4/26/2011	7:46:09 PM	PH3 valve closed
4/26/2011	7:46:09 PM	SiCl4 pre valve closed
4/26/2011	7:46:09 PM	SiCl4 post valve closed
4/26/2011	7:46:09 PM	Main Vac valve closed
4/26/2011	7:46:09 PM	Bypass valve closed
4/26/2011	7:46:09 PM	Bubbler valve closed
4/26/2011	7:46:09 PM	H2 valve opened
4/26/2011	7:46:09 PM	Helium MFC set to  0.000000
4/26/2011	7:46:09 PM	H2 MFC set to  500.000000
4/26/2011	7:46:09 PM	BCl3 MFC set to  0.000000
4/26/2011	7:46:09 PM	PHl3 MFC set to  0.000000
4/26/2011	7:46:09 PM	SiCl4 MFC set to  0.000000
4/26/2011	7:46:09 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	7:46:09 PM	Tube furnace set to 0
4/26/2011	7:47:27 PM	Helium valve closed
4/26/2011	7:47:27 PM	BCl3 valve closed
4/26/2011	7:47:27 PM	PH3 valve closed
4/26/2011	7:47:27 PM	SiCl4 pre valve closed
4/26/2011	7:47:27 PM	SiCl4 post valve closed
4/26/2011	7:47:27 PM	Main Vac valve closed
4/26/2011	7:47:27 PM	Bypass valve closed
4/26/2011	7:47:27 PM	H2 valve opened
4/26/2011	7:47:27 PM	Bubbler valve opened
4/26/2011	7:47:27 PM	Helium MFC set to  0.000000
4/26/2011	7:47:27 PM	H2 MFC set to  500.000000
4/26/2011	7:47:27 PM	BCl3 MFC set to  0.000000
4/26/2011	7:47:27 PM	PHl3 MFC set to  0.000000
4/26/2011	7:47:27 PM	SiCl4 MFC set to  0.000000
4/26/2011	7:47:27 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	7:47:28 PM	Tube furnace set to 1000
4/26/2011	8:07:28 PM	Helium valve closed
4/26/2011	8:07:28 PM	PH3 valve closed
4/26/2011	8:07:28 PM	Main Vac valve closed
4/26/2011	8:07:28 PM	Bypass valve closed
4/26/2011	8:07:28 PM	H2 valve opened
4/26/2011	8:07:28 PM	BCl3 valve opened
4/26/2011	8:07:28 PM	SiCl4 pre valve opened
4/26/2011	8:07:28 PM	SiCl4 post valve opened
4/26/2011	8:07:28 PM	Bubbler valve opened
4/26/2011	8:07:28 PM	Helium MFC set to  0.000000
4/26/2011	8:07:28 PM	H2 MFC set to  500.000000
4/26/2011	8:07:28 PM	BCl3 MFC set to  3.000000
4/26/2011	8:07:28 PM	PHl3 MFC set to  0.000000
4/26/2011	8:07:28 PM	SiCl4 MFC set to  50.000000
4/26/2011	8:07:28 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	8:07:28 PM	Tube furnace set to 1000
4/26/2011	8:22:28 PM	H2 valve closed
4/26/2011	8:22:28 PM	BCl3 valve closed
4/26/2011	8:22:28 PM	PH3 valve closed
4/26/2011	8:22:28 PM	SiCl4 pre valve closed
4/26/2011	8:22:28 PM	SiCl4 post valve closed
4/26/2011	8:22:28 PM	Main Vac valve closed
4/26/2011	8:22:28 PM	Bypass valve closed
4/26/2011	8:22:28 PM	Helium valve opened
4/26/2011	8:22:28 PM	Bubbler valve opened
4/26/2011	8:22:28 PM	Helium MFC set to  500.000000
4/26/2011	8:22:28 PM	H2 MFC set to  0.000000
4/26/2011	8:22:28 PM	BCl3 MFC set to  0.000000
4/26/2011	8:22:28 PM	PHl3 MFC set to  0.000000
4/26/2011	8:22:28 PM	SiCl4 MFC set to  0.000000
4/26/2011	8:22:28 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	8:22:28 PM	Tube furnace set to 0
4/26/2011	8:42:28 PM	Helium valve closed
4/26/2011	8:42:28 PM	H2 valve closed
4/26/2011	8:42:28 PM	BCl3 valve closed
4/26/2011	8:42:28 PM	PH3 valve closed
4/26/2011	8:42:28 PM	SiCl4 pre valve closed
4/26/2011	8:42:28 PM	SiCl4 post valve closed
4/26/2011	8:42:28 PM	Main Vac valve closed
4/26/2011	8:42:28 PM	Bypass valve closed
4/26/2011	8:42:28 PM	Bubbler valve closed
4/26/2011	8:42:28 PM	Helium MFC set to  0.000000
4/26/2011	8:42:28 PM	H2 MFC set to  0.000000
4/26/2011	8:42:28 PM	BCl3 MFC set to  0.000000
4/26/2011	8:42:28 PM	PHl3 MFC set to  0.000000
4/26/2011	8:42:28 PM	SiCl4 MFC set to  0.000000
4/26/2011	8:42:28 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	8:42:28 PM	Tube furnace set to 0
4/26/2011	8:42:28 PM	Run finished at 8:42 PM
4/26/2011	8:48:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/26/2011	8:48:21 PM	Recipe started at 8:48 PM
4/26/2011	8:48:21 PM	Helium valve closed
4/26/2011	8:48:21 PM	H2 valve closed
4/26/2011	8:48:21 PM	BCl3 valve closed
4/26/2011	8:48:21 PM	PH3 valve closed
4/26/2011	8:48:21 PM	SiCl4 pre valve closed
4/26/2011	8:48:21 PM	SiCl4 post valve closed
4/26/2011	8:48:21 PM	Main Vac valve closed
4/26/2011	8:48:21 PM	Bubbler valve closed
4/26/2011	8:48:21 PM	Bypass valve opened
4/26/2011	8:48:21 PM	Helium MFC set to  0.000000
4/26/2011	8:48:21 PM	H2 MFC set to  0.000000
4/26/2011	8:48:22 PM	BCl3 MFC set to  0.000000
4/26/2011	8:48:22 PM	PHl3 MFC set to  0.000000
4/26/2011	8:48:22 PM	SiCl4 MFC set to  0.000000
4/26/2011	8:48:22 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	8:48:22 PM	Tube furnace set to 0
4/26/2011	8:48:54 PM	Helium valve closed
4/26/2011	8:48:54 PM	H2 valve closed
4/26/2011	8:48:54 PM	BCl3 valve closed
4/26/2011	8:48:54 PM	PH3 valve closed
4/26/2011	8:48:54 PM	SiCl4 pre valve closed
4/26/2011	8:48:54 PM	SiCl4 post valve closed
4/26/2011	8:48:54 PM	Bubbler valve closed
4/26/2011	8:48:54 PM	Main Vac valve opened
4/26/2011	8:48:54 PM	Bypass valve opened
4/26/2011	8:48:54 PM	Helium MFC set to  0.000000
4/26/2011	8:48:54 PM	H2 MFC set to  0.000000
4/26/2011	8:48:54 PM	BCl3 MFC set to  0.000000
4/26/2011	8:48:54 PM	PHl3 MFC set to  0.000000
4/26/2011	8:48:54 PM	SiCl4 MFC set to  0.000000
4/26/2011	8:48:54 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	8:48:55 PM	Tube furnace set to 0
4/26/2011	8:49:55 PM	H2 valve closed
4/26/2011	8:49:55 PM	BCl3 valve closed
4/26/2011	8:49:55 PM	PH3 valve closed
4/26/2011	8:49:55 PM	SiCl4 pre valve closed
4/26/2011	8:49:55 PM	SiCl4 post valve closed
4/26/2011	8:49:55 PM	Bubbler valve closed
4/26/2011	8:49:55 PM	Helium valve opened
4/26/2011	8:49:55 PM	Main Vac valve opened
4/26/2011	8:49:55 PM	Bypass valve opened
4/26/2011	8:49:55 PM	Helium MFC set to  100.000000
4/26/2011	8:49:55 PM	H2 MFC set to  0.000000
4/26/2011	8:49:55 PM	BCl3 MFC set to  0.000000
4/26/2011	8:49:55 PM	PHl3 MFC set to  0.000000
4/26/2011	8:49:55 PM	SiCl4 MFC set to  0.000000
4/26/2011	8:49:55 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	8:49:55 PM	Tube furnace set to 0
4/26/2011	8:50:55 PM	Helium valve closed
4/26/2011	8:50:55 PM	H2 valve closed
4/26/2011	8:50:55 PM	BCl3 valve closed
4/26/2011	8:50:55 PM	PH3 valve closed
4/26/2011	8:50:55 PM	SiCl4 pre valve closed
4/26/2011	8:50:55 PM	SiCl4 post valve closed
4/26/2011	8:50:55 PM	Bubbler valve closed
4/26/2011	8:50:55 PM	Main Vac valve opened
4/26/2011	8:50:55 PM	Bypass valve opened
4/26/2011	8:50:55 PM	Helium MFC set to  0.000000
4/26/2011	8:50:55 PM	H2 MFC set to  0.000000
4/26/2011	8:50:55 PM	BCl3 MFC set to  0.000000
4/26/2011	8:50:55 PM	PHl3 MFC set to  0.000000
4/26/2011	8:50:55 PM	SiCl4 MFC set to  0.000000
4/26/2011	8:50:55 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	8:50:55 PM	Tube furnace set to 0
4/26/2011	8:51:55 PM	H2 valve closed
4/26/2011	8:51:55 PM	BCl3 valve closed
4/26/2011	8:51:55 PM	PH3 valve closed
4/26/2011	8:51:55 PM	SiCl4 pre valve closed
4/26/2011	8:51:55 PM	SiCl4 post valve closed
4/26/2011	8:51:55 PM	Bubbler valve closed
4/26/2011	8:51:55 PM	Helium valve opened
4/26/2011	8:51:55 PM	Main Vac valve opened
4/26/2011	8:51:55 PM	Bypass valve opened
4/26/2011	8:51:55 PM	Helium MFC set to  100.000000
4/26/2011	8:51:55 PM	H2 MFC set to  0.000000
4/26/2011	8:51:55 PM	BCl3 MFC set to  0.000000
4/26/2011	8:51:55 PM	PHl3 MFC set to  0.000000
4/26/2011	8:51:55 PM	SiCl4 MFC set to  0.000000
4/26/2011	8:51:55 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	8:51:55 PM	Tube furnace set to 0
4/26/2011	8:52:55 PM	Helium valve closed
4/26/2011	8:52:55 PM	H2 valve closed
4/26/2011	8:52:55 PM	BCl3 valve closed
4/26/2011	8:52:55 PM	PH3 valve closed
4/26/2011	8:52:55 PM	SiCl4 pre valve closed
4/26/2011	8:52:55 PM	SiCl4 post valve closed
4/26/2011	8:52:55 PM	Bubbler valve closed
4/26/2011	8:52:55 PM	Main Vac valve opened
4/26/2011	8:52:55 PM	Bypass valve opened
4/26/2011	8:52:55 PM	Helium MFC set to  0.000000
4/26/2011	8:52:55 PM	H2 MFC set to  0.000000
4/26/2011	8:52:55 PM	BCl3 MFC set to  0.000000
4/26/2011	8:52:55 PM	PHl3 MFC set to  0.000000
4/26/2011	8:52:55 PM	SiCl4 MFC set to  0.000000
4/26/2011	8:52:55 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	8:52:55 PM	Tube furnace set to 0
4/26/2011	8:53:55 PM	H2 valve closed
4/26/2011	8:53:55 PM	BCl3 valve closed
4/26/2011	8:53:55 PM	PH3 valve closed
4/26/2011	8:53:55 PM	SiCl4 pre valve closed
4/26/2011	8:53:55 PM	SiCl4 post valve closed
4/26/2011	8:53:55 PM	Bubbler valve closed
4/26/2011	8:53:55 PM	Helium valve opened
4/26/2011	8:53:55 PM	Main Vac valve opened
4/26/2011	8:53:55 PM	Bypass valve opened
4/26/2011	8:53:55 PM	Helium MFC set to  100.000000
4/26/2011	8:53:55 PM	H2 MFC set to  0.000000
4/26/2011	8:53:55 PM	BCl3 MFC set to  0.000000
4/26/2011	8:53:55 PM	PHl3 MFC set to  0.000000
4/26/2011	8:53:55 PM	SiCl4 MFC set to  0.000000
4/26/2011	8:53:55 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	8:53:56 PM	Tube furnace set to 0
4/26/2011	8:54:56 PM	Helium valve closed
4/26/2011	8:54:56 PM	H2 valve closed
4/26/2011	8:54:56 PM	BCl3 valve closed
4/26/2011	8:54:56 PM	PH3 valve closed
4/26/2011	8:54:56 PM	SiCl4 pre valve closed
4/26/2011	8:54:56 PM	SiCl4 post valve closed
4/26/2011	8:54:56 PM	Bubbler valve closed
4/26/2011	8:54:56 PM	Main Vac valve opened
4/26/2011	8:54:56 PM	Bypass valve opened
4/26/2011	8:54:56 PM	Helium MFC set to  0.000000
4/26/2011	8:54:56 PM	H2 MFC set to  0.000000
4/26/2011	8:54:56 PM	BCl3 MFC set to  0.000000
4/26/2011	8:54:56 PM	PHl3 MFC set to  0.000000
4/26/2011	8:54:56 PM	SiCl4 MFC set to  0.000000
4/26/2011	8:54:56 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	8:54:56 PM	Tube furnace set to 0
4/26/2011	8:55:56 PM	H2 valve closed
4/26/2011	8:55:56 PM	BCl3 valve closed
4/26/2011	8:55:56 PM	PH3 valve closed
4/26/2011	8:55:56 PM	SiCl4 pre valve closed
4/26/2011	8:55:56 PM	SiCl4 post valve closed
4/26/2011	8:55:56 PM	Bubbler valve closed
4/26/2011	8:55:56 PM	Helium valve opened
4/26/2011	8:55:56 PM	Main Vac valve opened
4/26/2011	8:55:56 PM	Bypass valve opened
4/26/2011	8:55:56 PM	Helium MFC set to  100.000000
4/26/2011	8:55:56 PM	H2 MFC set to  0.000000
4/26/2011	8:55:56 PM	BCl3 MFC set to  0.000000
4/26/2011	8:55:56 PM	PHl3 MFC set to  0.000000
4/26/2011	8:55:56 PM	SiCl4 MFC set to  0.000000
4/26/2011	8:55:56 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	8:55:56 PM	Tube furnace set to 0
4/26/2011	8:56:56 PM	Helium valve closed
4/26/2011	8:56:56 PM	H2 valve closed
4/26/2011	8:56:56 PM	BCl3 valve closed
4/26/2011	8:56:56 PM	PH3 valve closed
4/26/2011	8:56:56 PM	SiCl4 pre valve closed
4/26/2011	8:56:56 PM	SiCl4 post valve closed
4/26/2011	8:56:56 PM	Bubbler valve closed
4/26/2011	8:56:56 PM	Main Vac valve opened
4/26/2011	8:56:56 PM	Bypass valve opened
4/26/2011	8:56:56 PM	Helium MFC set to  0.000000
4/26/2011	8:56:56 PM	H2 MFC set to  0.000000
4/26/2011	8:56:56 PM	BCl3 MFC set to  0.000000
4/26/2011	8:56:56 PM	PHl3 MFC set to  0.000000
4/26/2011	8:56:56 PM	SiCl4 MFC set to  0.000000
4/26/2011	8:56:56 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	8:56:56 PM	Tube furnace set to 0
4/26/2011	8:57:56 PM	H2 valve closed
4/26/2011	8:57:56 PM	BCl3 valve closed
4/26/2011	8:57:56 PM	PH3 valve closed
4/26/2011	8:57:56 PM	SiCl4 pre valve closed
4/26/2011	8:57:56 PM	SiCl4 post valve closed
4/26/2011	8:57:56 PM	Bubbler valve closed
4/26/2011	8:57:56 PM	Helium valve opened
4/26/2011	8:57:56 PM	Main Vac valve opened
4/26/2011	8:57:56 PM	Bypass valve opened
4/26/2011	8:57:56 PM	Helium MFC set to  100.000000
4/26/2011	8:57:56 PM	H2 MFC set to  0.000000
4/26/2011	8:57:56 PM	BCl3 MFC set to  0.000000
4/26/2011	8:57:56 PM	PHl3 MFC set to  0.000000
4/26/2011	8:57:56 PM	SiCl4 MFC set to  0.000000
4/26/2011	8:57:56 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	8:57:56 PM	Tube furnace set to 0
4/26/2011	8:58:56 PM	Helium valve closed
4/26/2011	8:58:56 PM	H2 valve closed
4/26/2011	8:58:56 PM	BCl3 valve closed
4/26/2011	8:58:56 PM	PH3 valve closed
4/26/2011	8:58:56 PM	SiCl4 pre valve closed
4/26/2011	8:58:56 PM	SiCl4 post valve closed
4/26/2011	8:58:56 PM	Bubbler valve closed
4/26/2011	8:58:56 PM	Main Vac valve opened
4/26/2011	8:58:56 PM	Bypass valve opened
4/26/2011	8:58:56 PM	Helium MFC set to  0.000000
4/26/2011	8:58:56 PM	H2 MFC set to  0.000000
4/26/2011	8:58:56 PM	BCl3 MFC set to  0.000000
4/26/2011	8:58:56 PM	PHl3 MFC set to  0.000000
4/26/2011	8:58:56 PM	SiCl4 MFC set to  0.000000
4/26/2011	8:58:56 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	8:58:57 PM	Tube furnace set to 0
4/26/2011	8:59:57 PM	H2 valve closed
4/26/2011	8:59:57 PM	BCl3 valve closed
4/26/2011	8:59:57 PM	PH3 valve closed
4/26/2011	8:59:57 PM	SiCl4 pre valve closed
4/26/2011	8:59:57 PM	SiCl4 post valve closed
4/26/2011	8:59:57 PM	Bubbler valve closed
4/26/2011	8:59:57 PM	Helium valve opened
4/26/2011	8:59:57 PM	Main Vac valve opened
4/26/2011	8:59:57 PM	Bypass valve opened
4/26/2011	8:59:57 PM	Helium MFC set to  100.000000
4/26/2011	8:59:57 PM	H2 MFC set to  0.000000
4/26/2011	8:59:57 PM	BCl3 MFC set to  0.000000
4/26/2011	8:59:57 PM	PHl3 MFC set to  0.000000
4/26/2011	8:59:57 PM	SiCl4 MFC set to  0.000000
4/26/2011	8:59:57 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	8:59:57 PM	Tube furnace set to 0
4/26/2011	9:00:57 PM	Helium valve closed
4/26/2011	9:00:57 PM	H2 valve closed
4/26/2011	9:00:57 PM	BCl3 valve closed
4/26/2011	9:00:57 PM	PH3 valve closed
4/26/2011	9:00:57 PM	SiCl4 pre valve closed
4/26/2011	9:00:57 PM	SiCl4 post valve closed
4/26/2011	9:00:57 PM	Bubbler valve closed
4/26/2011	9:00:57 PM	Main Vac valve opened
4/26/2011	9:00:57 PM	Bypass valve opened
4/26/2011	9:00:57 PM	Helium MFC set to  0.000000
4/26/2011	9:00:57 PM	H2 MFC set to  0.000000
4/26/2011	9:00:57 PM	BCl3 MFC set to  0.000000
4/26/2011	9:00:57 PM	PHl3 MFC set to  0.000000
4/26/2011	9:00:57 PM	SiCl4 MFC set to  0.000000
4/26/2011	9:00:57 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	9:00:57 PM	Tube furnace set to 0
4/26/2011	9:01:57 PM	H2 valve closed
4/26/2011	9:01:57 PM	BCl3 valve closed
4/26/2011	9:01:57 PM	PH3 valve closed
4/26/2011	9:01:57 PM	SiCl4 pre valve closed
4/26/2011	9:01:57 PM	SiCl4 post valve closed
4/26/2011	9:01:57 PM	Bubbler valve closed
4/26/2011	9:01:57 PM	Helium valve opened
4/26/2011	9:01:57 PM	Main Vac valve opened
4/26/2011	9:01:57 PM	Bypass valve opened
4/26/2011	9:01:57 PM	Helium MFC set to  100.000000
4/26/2011	9:01:57 PM	H2 MFC set to  0.000000
4/26/2011	9:01:57 PM	BCl3 MFC set to  0.000000
4/26/2011	9:01:57 PM	PHl3 MFC set to  0.000000
4/26/2011	9:01:57 PM	SiCl4 MFC set to  0.000000
4/26/2011	9:01:57 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	9:01:57 PM	Tube furnace set to 0
4/26/2011	9:02:57 PM	Helium valve closed
4/26/2011	9:02:57 PM	H2 valve closed
4/26/2011	9:02:57 PM	BCl3 valve closed
4/26/2011	9:02:57 PM	PH3 valve closed
4/26/2011	9:02:57 PM	SiCl4 pre valve closed
4/26/2011	9:02:57 PM	SiCl4 post valve closed
4/26/2011	9:02:57 PM	Bubbler valve closed
4/26/2011	9:02:57 PM	Main Vac valve opened
4/26/2011	9:02:57 PM	Bypass valve opened
4/26/2011	9:02:57 PM	Helium MFC set to  0.000000
4/26/2011	9:02:57 PM	H2 MFC set to  0.000000
4/26/2011	9:02:57 PM	BCl3 MFC set to  0.000000
4/26/2011	9:02:57 PM	PHl3 MFC set to  0.000000
4/26/2011	9:02:57 PM	SiCl4 MFC set to  0.000000
4/26/2011	9:02:57 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	9:02:57 PM	Tube furnace set to 0
4/26/2011	9:03:57 PM	H2 valve closed
4/26/2011	9:03:57 PM	BCl3 valve closed
4/26/2011	9:03:57 PM	PH3 valve closed
4/26/2011	9:03:57 PM	SiCl4 pre valve closed
4/26/2011	9:03:57 PM	SiCl4 post valve closed
4/26/2011	9:03:57 PM	Bubbler valve closed
4/26/2011	9:03:57 PM	Helium valve opened
4/26/2011	9:03:57 PM	Main Vac valve opened
4/26/2011	9:03:57 PM	Bypass valve opened
4/26/2011	9:03:57 PM	Helium MFC set to  100.000000
4/26/2011	9:03:57 PM	H2 MFC set to  0.000000
4/26/2011	9:03:57 PM	BCl3 MFC set to  0.000000
4/26/2011	9:03:57 PM	PHl3 MFC set to  0.000000
4/26/2011	9:03:57 PM	SiCl4 MFC set to  0.000000
4/26/2011	9:03:57 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	9:03:58 PM	Tube furnace set to 0
4/26/2011	9:04:58 PM	Helium valve closed
4/26/2011	9:04:58 PM	H2 valve closed
4/26/2011	9:04:58 PM	BCl3 valve closed
4/26/2011	9:04:58 PM	PH3 valve closed
4/26/2011	9:04:58 PM	SiCl4 pre valve closed
4/26/2011	9:04:58 PM	SiCl4 post valve closed
4/26/2011	9:04:58 PM	Bubbler valve closed
4/26/2011	9:04:58 PM	Main Vac valve opened
4/26/2011	9:04:58 PM	Bypass valve opened
4/26/2011	9:04:58 PM	Helium MFC set to  0.000000
4/26/2011	9:04:58 PM	H2 MFC set to  0.000000
4/26/2011	9:04:58 PM	BCl3 MFC set to  0.000000
4/26/2011	9:04:58 PM	PHl3 MFC set to  0.000000
4/26/2011	9:04:58 PM	SiCl4 MFC set to  0.000000
4/26/2011	9:04:58 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	9:04:58 PM	Tube furnace set to 0
4/26/2011	9:05:58 PM	H2 valve closed
4/26/2011	9:05:58 PM	BCl3 valve closed
4/26/2011	9:05:58 PM	PH3 valve closed
4/26/2011	9:05:58 PM	SiCl4 pre valve closed
4/26/2011	9:05:58 PM	SiCl4 post valve closed
4/26/2011	9:05:58 PM	Bubbler valve closed
4/26/2011	9:05:58 PM	Helium valve opened
4/26/2011	9:05:58 PM	Main Vac valve opened
4/26/2011	9:05:58 PM	Bypass valve opened
4/26/2011	9:05:58 PM	Helium MFC set to  100.000000
4/26/2011	9:05:58 PM	H2 MFC set to  0.000000
4/26/2011	9:05:58 PM	BCl3 MFC set to  0.000000
4/26/2011	9:05:58 PM	PHl3 MFC set to  0.000000
4/26/2011	9:05:58 PM	SiCl4 MFC set to  0.000000
4/26/2011	9:05:58 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	9:05:58 PM	Tube furnace set to 0
4/26/2011	9:06:58 PM	Helium valve closed
4/26/2011	9:06:58 PM	H2 valve closed
4/26/2011	9:06:58 PM	BCl3 valve closed
4/26/2011	9:06:58 PM	PH3 valve closed
4/26/2011	9:06:58 PM	SiCl4 pre valve closed
4/26/2011	9:06:58 PM	SiCl4 post valve closed
4/26/2011	9:06:58 PM	Bubbler valve closed
4/26/2011	9:06:58 PM	Main Vac valve opened
4/26/2011	9:06:58 PM	Bypass valve opened
4/26/2011	9:06:58 PM	Helium MFC set to  0.000000
4/26/2011	9:06:58 PM	H2 MFC set to  0.000000
4/26/2011	9:06:58 PM	BCl3 MFC set to  0.000000
4/26/2011	9:06:58 PM	PHl3 MFC set to  0.000000
4/26/2011	9:06:58 PM	SiCl4 MFC set to  0.000000
4/26/2011	9:06:58 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	9:06:58 PM	Tube furnace set to 0
4/26/2011	9:07:58 PM	H2 valve closed
4/26/2011	9:07:58 PM	BCl3 valve closed
4/26/2011	9:07:58 PM	PH3 valve closed
4/26/2011	9:07:58 PM	SiCl4 pre valve closed
4/26/2011	9:07:58 PM	SiCl4 post valve closed
4/26/2011	9:07:58 PM	Bubbler valve closed
4/26/2011	9:07:58 PM	Helium valve opened
4/26/2011	9:07:58 PM	Main Vac valve opened
4/26/2011	9:07:58 PM	Bypass valve opened
4/26/2011	9:07:58 PM	Helium MFC set to  100.000000
4/26/2011	9:07:58 PM	H2 MFC set to  0.000000
4/26/2011	9:07:58 PM	BCl3 MFC set to  0.000000
4/26/2011	9:07:58 PM	PHl3 MFC set to  0.000000
4/26/2011	9:07:58 PM	SiCl4 MFC set to  0.000000
4/26/2011	9:07:58 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	9:07:58 PM	Tube furnace set to 0
4/26/2011	9:08:58 PM	Helium valve closed
4/26/2011	9:08:58 PM	H2 valve closed
4/26/2011	9:08:58 PM	BCl3 valve closed
4/26/2011	9:08:58 PM	PH3 valve closed
4/26/2011	9:08:58 PM	SiCl4 pre valve closed
4/26/2011	9:08:58 PM	SiCl4 post valve closed
4/26/2011	9:08:58 PM	Bubbler valve closed
4/26/2011	9:08:58 PM	Main Vac valve opened
4/26/2011	9:08:58 PM	Bypass valve opened
4/26/2011	9:08:58 PM	Helium MFC set to  0.000000
4/26/2011	9:08:58 PM	H2 MFC set to  0.000000
4/26/2011	9:08:58 PM	BCl3 MFC set to  0.000000
4/26/2011	9:08:58 PM	PHl3 MFC set to  0.000000
4/26/2011	9:08:58 PM	SiCl4 MFC set to  0.000000
4/26/2011	9:08:58 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	9:08:59 PM	Tube furnace set to 0
4/26/2011	9:09:00 PM	Run finished at 9:09 PM
4/26/2011	9:09:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/26/2011	9:33:14 PM	Recipe started at 9:33 PM
4/26/2011	9:33:14 PM	Helium valve closed
4/26/2011	9:33:14 PM	BCl3 valve closed
4/26/2011	9:33:14 PM	PH3 valve closed
4/26/2011	9:33:14 PM	SiCl4 pre valve closed
4/26/2011	9:33:14 PM	SiCl4 post valve closed
4/26/2011	9:33:14 PM	Main Vac valve closed
4/26/2011	9:33:14 PM	Bypass valve closed
4/26/2011	9:33:14 PM	Bubbler valve closed
4/26/2011	9:33:14 PM	H2 valve opened
4/26/2011	9:33:14 PM	Helium MFC set to  0.000000
4/26/2011	9:33:14 PM	H2 MFC set to  500.000000
4/26/2011	9:33:14 PM	BCl3 MFC set to  0.000000
4/26/2011	9:33:14 PM	PHl3 MFC set to  0.000000
4/26/2011	9:33:14 PM	SiCl4 MFC set to  0.000000
4/26/2011	9:33:14 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	9:33:14 PM	Tube furnace set to 0
4/26/2011	9:34:31 PM	Helium valve closed
4/26/2011	9:34:31 PM	BCl3 valve closed
4/26/2011	9:34:31 PM	PH3 valve closed
4/26/2011	9:34:31 PM	SiCl4 pre valve closed
4/26/2011	9:34:31 PM	SiCl4 post valve closed
4/26/2011	9:34:31 PM	Main Vac valve closed
4/26/2011	9:34:31 PM	Bypass valve closed
4/26/2011	9:34:31 PM	H2 valve opened
4/26/2011	9:34:31 PM	Bubbler valve opened
4/26/2011	9:34:31 PM	Helium MFC set to  0.000000
4/26/2011	9:34:31 PM	H2 MFC set to  500.000000
4/26/2011	9:34:31 PM	BCl3 MFC set to  0.000000
4/26/2011	9:34:31 PM	PHl3 MFC set to  0.000000
4/26/2011	9:34:31 PM	SiCl4 MFC set to  0.000000
4/26/2011	9:34:31 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	9:34:31 PM	Tube furnace set to 1000
4/26/2011	9:54:31 PM	Helium valve closed
4/26/2011	9:54:31 PM	PH3 valve closed
4/26/2011	9:54:31 PM	Main Vac valve closed
4/26/2011	9:54:31 PM	Bypass valve closed
4/26/2011	9:54:31 PM	H2 valve opened
4/26/2011	9:54:31 PM	BCl3 valve opened
4/26/2011	9:54:31 PM	SiCl4 pre valve opened
4/26/2011	9:54:31 PM	SiCl4 post valve opened
4/26/2011	9:54:31 PM	Bubbler valve opened
4/26/2011	9:54:31 PM	Helium MFC set to  0.000000
4/26/2011	9:54:31 PM	H2 MFC set to  500.000000
4/26/2011	9:54:31 PM	BCl3 MFC set to  3.000000
4/26/2011	9:54:31 PM	PHl3 MFC set to  0.000000
4/26/2011	9:54:31 PM	SiCl4 MFC set to  50.000000
4/26/2011	9:54:31 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	9:54:31 PM	Tube furnace set to 1000
4/26/2011	10:09:31 PM	H2 valve closed
4/26/2011	10:09:31 PM	BCl3 valve closed
4/26/2011	10:09:31 PM	PH3 valve closed
4/26/2011	10:09:31 PM	SiCl4 pre valve closed
4/26/2011	10:09:31 PM	SiCl4 post valve closed
4/26/2011	10:09:31 PM	Main Vac valve closed
4/26/2011	10:09:31 PM	Bypass valve closed
4/26/2011	10:09:31 PM	Helium valve opened
4/26/2011	10:09:31 PM	Bubbler valve opened
4/26/2011	10:09:31 PM	Helium MFC set to  500.000000
4/26/2011	10:09:31 PM	H2 MFC set to  0.000000
4/26/2011	10:09:31 PM	BCl3 MFC set to  0.000000
4/26/2011	10:09:31 PM	PHl3 MFC set to  0.000000
4/26/2011	10:09:31 PM	SiCl4 MFC set to  0.000000
4/26/2011	10:09:31 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	10:09:32 PM	Tube furnace set to 0
4/26/2011	10:29:32 PM	Helium valve closed
4/26/2011	10:29:32 PM	H2 valve closed
4/26/2011	10:29:32 PM	BCl3 valve closed
4/26/2011	10:29:32 PM	PH3 valve closed
4/26/2011	10:29:32 PM	SiCl4 pre valve closed
4/26/2011	10:29:32 PM	SiCl4 post valve closed
4/26/2011	10:29:32 PM	Main Vac valve closed
4/26/2011	10:29:32 PM	Bypass valve closed
4/26/2011	10:29:32 PM	Bubbler valve closed
4/26/2011	10:29:32 PM	Helium MFC set to  0.000000
4/26/2011	10:29:32 PM	H2 MFC set to  0.000000
4/26/2011	10:29:32 PM	BCl3 MFC set to  0.000000
4/26/2011	10:29:32 PM	PHl3 MFC set to  0.000000
4/26/2011	10:29:32 PM	SiCl4 MFC set to  0.000000
4/26/2011	10:29:32 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	10:29:32 PM	Tube furnace set to 0
4/26/2011	10:29:32 PM	Run finished at 10:29 PM
4/26/2011	10:40:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/26/2011	10:40:54 PM	Recipe started at 10:40 PM
4/26/2011	10:40:54 PM	Helium valve closed
4/26/2011	10:40:54 PM	H2 valve closed
4/26/2011	10:40:54 PM	BCl3 valve closed
4/26/2011	10:40:54 PM	PH3 valve closed
4/26/2011	10:40:54 PM	SiCl4 pre valve closed
4/26/2011	10:40:54 PM	SiCl4 post valve closed
4/26/2011	10:40:54 PM	Main Vac valve closed
4/26/2011	10:40:54 PM	Bubbler valve closed
4/26/2011	10:40:54 PM	Bypass valve opened
4/26/2011	10:40:54 PM	Helium MFC set to  0.000000
4/26/2011	10:40:54 PM	H2 MFC set to  0.000000
4/26/2011	10:40:54 PM	BCl3 MFC set to  0.000000
4/26/2011	10:40:54 PM	PHl3 MFC set to  0.000000
4/26/2011	10:40:54 PM	SiCl4 MFC set to  0.000000
4/26/2011	10:40:54 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	10:40:54 PM	Tube furnace set to 0
4/26/2011	10:41:26 PM	Helium valve closed
4/26/2011	10:41:26 PM	H2 valve closed
4/26/2011	10:41:26 PM	BCl3 valve closed
4/26/2011	10:41:26 PM	PH3 valve closed
4/26/2011	10:41:26 PM	SiCl4 pre valve closed
4/26/2011	10:41:26 PM	SiCl4 post valve closed
4/26/2011	10:41:26 PM	Bubbler valve closed
4/26/2011	10:41:26 PM	Main Vac valve opened
4/26/2011	10:41:26 PM	Bypass valve opened
4/26/2011	10:41:26 PM	Helium MFC set to  0.000000
4/26/2011	10:41:26 PM	H2 MFC set to  0.000000
4/26/2011	10:41:26 PM	BCl3 MFC set to  0.000000
4/26/2011	10:41:26 PM	PHl3 MFC set to  0.000000
4/26/2011	10:41:26 PM	SiCl4 MFC set to  0.000000
4/26/2011	10:41:26 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	10:41:27 PM	Tube furnace set to 0
4/26/2011	10:41:27 PM	Run finished at 10:41 PM
4/26/2011	10:41:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/26/2011	10:51:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/26/2011	10:51:36 PM	Recipe started at 10:51 PM
4/26/2011	10:51:36 PM	H2 valve closed
4/26/2011	10:51:36 PM	BCl3 valve closed
4/26/2011	10:51:36 PM	PH3 valve closed
4/26/2011	10:51:36 PM	SiCl4 pre valve closed
4/26/2011	10:51:36 PM	SiCl4 post valve closed
4/26/2011	10:51:36 PM	Main Vac valve closed
4/26/2011	10:51:36 PM	Bypass valve closed
4/26/2011	10:51:36 PM	Bubbler valve closed
4/26/2011	10:51:36 PM	Helium valve opened
4/26/2011	10:51:36 PM	Helium MFC set to  500.000000
4/26/2011	10:51:36 PM	H2 MFC set to  0.000000
4/26/2011	10:51:36 PM	BCl3 MFC set to  0.000000
4/26/2011	10:51:36 PM	PHl3 MFC set to  0.000000
4/26/2011	10:51:36 PM	SiCl4 MFC set to  0.000000
4/26/2011	10:51:36 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	10:51:36 PM	Tube furnace set to 0
4/26/2011	10:52:55 PM	Helium valve closed
4/26/2011	10:52:55 PM	H2 valve closed
4/26/2011	10:52:55 PM	BCl3 valve closed
4/26/2011	10:52:55 PM	PH3 valve closed
4/26/2011	10:52:55 PM	SiCl4 pre valve closed
4/26/2011	10:52:55 PM	SiCl4 post valve closed
4/26/2011	10:52:55 PM	Main Vac valve closed
4/26/2011	10:52:55 PM	Bypass valve closed
4/26/2011	10:52:55 PM	Bubbler valve closed
4/26/2011	10:52:55 PM	Helium MFC set to  0.000000
4/26/2011	10:52:55 PM	H2 MFC set to  0.000000
4/26/2011	10:52:55 PM	BCl3 MFC set to  0.000000
4/26/2011	10:52:55 PM	PHl3 MFC set to  0.000000
4/26/2011	10:52:55 PM	SiCl4 MFC set to  0.000000
4/26/2011	10:52:55 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	10:52:55 PM	Tube furnace set to 0
4/26/2011	10:52:55 PM	Run finished at 10:52 PM
4/26/2011	10:52:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/26/2011	10:55:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/26/2011	10:55:56 PM	Recipe started at 10:55 PM
4/26/2011	10:55:56 PM	Helium valve closed
4/26/2011	10:55:56 PM	H2 valve closed
4/26/2011	10:55:56 PM	BCl3 valve closed
4/26/2011	10:55:56 PM	PH3 valve closed
4/26/2011	10:55:56 PM	SiCl4 pre valve closed
4/26/2011	10:55:56 PM	SiCl4 post valve closed
4/26/2011	10:55:56 PM	Main Vac valve closed
4/26/2011	10:55:56 PM	Bubbler valve closed
4/26/2011	10:55:56 PM	Bypass valve opened
4/26/2011	10:55:56 PM	Helium MFC set to  0.000000
4/26/2011	10:55:56 PM	H2 MFC set to  0.000000
4/26/2011	10:55:56 PM	BCl3 MFC set to  0.000000
4/26/2011	10:55:56 PM	PHl3 MFC set to  0.000000
4/26/2011	10:55:56 PM	SiCl4 MFC set to  0.000000
4/26/2011	10:55:56 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	10:55:56 PM	Tube furnace set to 0
4/26/2011	10:56:28 PM	Helium valve closed
4/26/2011	10:56:28 PM	H2 valve closed
4/26/2011	10:56:28 PM	BCl3 valve closed
4/26/2011	10:56:28 PM	PH3 valve closed
4/26/2011	10:56:28 PM	SiCl4 pre valve closed
4/26/2011	10:56:28 PM	SiCl4 post valve closed
4/26/2011	10:56:28 PM	Bubbler valve closed
4/26/2011	10:56:28 PM	Main Vac valve opened
4/26/2011	10:56:28 PM	Bypass valve opened
4/26/2011	10:56:28 PM	Helium MFC set to  0.000000
4/26/2011	10:56:28 PM	H2 MFC set to  0.000000
4/26/2011	10:56:28 PM	BCl3 MFC set to  0.000000
4/26/2011	10:56:28 PM	PHl3 MFC set to  0.000000
4/26/2011	10:56:28 PM	SiCl4 MFC set to  0.000000
4/26/2011	10:56:28 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	10:56:28 PM	Tube furnace set to 0
4/26/2011	10:56:28 PM	Run finished at 10:56 PM
4/26/2011	10:56:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/26/2011	10:56:33 PM	Helium valve opened
4/26/2011	10:56:36 PM	Helium MFC set to  100.000000
4/26/2011	10:56:47 PM	Helium MFC set to  0.000000
4/26/2011	10:56:48 PM	Helium valve closed
4/26/2011	10:57:10 PM	Recipe started at 10:57 PM
4/26/2011	10:57:10 PM	BCl3 valve closed
4/26/2011	10:57:10 PM	PH3 valve closed
4/26/2011	10:57:10 PM	SiCl4 pre valve closed
4/26/2011	10:57:10 PM	SiCl4 post valve closed
4/26/2011	10:57:10 PM	Main Vac valve closed
4/26/2011	10:57:10 PM	Bypass valve closed
4/26/2011	10:57:10 PM	Bubbler valve closed
4/26/2011	10:57:10 PM	Helium valve opened
4/26/2011	10:57:10 PM	H2 valve opened
4/26/2011	10:57:10 PM	Helium MFC set to  190.000000
4/26/2011	10:57:10 PM	H2 MFC set to  10.000000
4/26/2011	10:57:10 PM	BCl3 MFC set to  0.000000
4/26/2011	10:57:10 PM	PHl3 MFC set to  0.000000
4/26/2011	10:57:10 PM	SiCl4 MFC set to  0.000000
4/26/2011	10:57:10 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	10:57:11 PM	Tube furnace set to 0
4/26/2011	11:00:28 PM	BCl3 valve closed
4/26/2011	11:00:28 PM	PH3 valve closed
4/26/2011	11:00:28 PM	SiCl4 pre valve closed
4/26/2011	11:00:28 PM	SiCl4 post valve closed
4/26/2011	11:00:28 PM	Main Vac valve closed
4/26/2011	11:00:28 PM	Bypass valve closed
4/26/2011	11:00:28 PM	Helium valve opened
4/26/2011	11:00:28 PM	H2 valve opened
4/26/2011	11:00:28 PM	Bubbler valve opened
4/26/2011	11:00:28 PM	Helium MFC set to  47.500000
4/26/2011	11:00:28 PM	H2 MFC set to  2.500000
4/26/2011	11:00:28 PM	BCl3 MFC set to  0.000000
4/26/2011	11:00:28 PM	PHl3 MFC set to  0.000000
4/26/2011	11:00:28 PM	SiCl4 MFC set to  0.000000
4/26/2011	11:00:28 PM	Bypass solenoid MFC set to  0.000000
4/26/2011	11:00:29 PM	Tube furnace set to 350
